PMS SLS Syringe Liquid Particle Sampler

Features:

  • Proven Particle Measuring Systems’ Chem20,  UltraChem or LiQuilaz particle counters
  • Menu-driven data collection – 1, 5, 10 and 25 ml
  • Wetted materials compatible with corrosive chemicals
  • Compact design with on-board particle sensor
PMS SLS Spec

SPECIFICATION

SLS Syringe Liquid Particle Sampler

The SLS Syringe Liquid Particle Sampler from Particle Measuring Systems uses a precision syringe and simple flow-path for delivering chemical samples from a sample vessel or chemical container, directly to the particle sensor. It is ideal for applications where precise, small-volume particle batch sampling is required, where the sampler device cannot contribute contamination to the chemical sample.
The system consists of a selectable syringe for either corrosive or non-corrosive liquids, a selectable particle counter for different sizing sensitivities, and batch-sampling software.
Particle Measuring Systems (PMS) sets the standard for cleanroom contamination monitoring. With more than 60 patents, PMS create the technology that enables you to make fact-based decisions, improve process yield and comply with changing regulatory requirements.

Features SLS Syringe Liquid Particle Sampler

  • Proven Particle Measuring Systems’ Chem20,  UltraChem or LiQuilaz particle counters
  • Menu-driven data collection – 1, 5, 10 and 25 ml
  • Wetted materials compatible with corrosive chemicals
  • Compact design with on-board particle sensor

Benefits

Cost-Effective

• Small sample volume minimizes waste of expensive
product
• Automated system saves time and money
• Compatibility with both corrosive and non-corrosive
liquids

Easy-to-Use

• Menu-driven data collection
• Recipes can be created and retrieved for repeatable
system operation with different operators
• Password security maintains system integrity

Versatile

• Ability to support a wide range of applications
• Programmable particle size thresholds
• Extremely accurate measurements

Applications

  • Diverse applications in semiconductor and process chemical manufacturing
  • Incoming quality measurement of process chemicals
  • Point-of-process monitoring on process tools
  • Testing and qualification of chemical components
  • Outgoing chemical qualification testing
  • Mechanical parts cleanliness testing

Product of Particle Measuring System

Brand

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