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Sensitivity range: 10 nm, Flowrate: 2.8 LPM (0.1 CFM)
Purpose-built nanoparticle counter designed specifically for use in the most critical fab spaces.
The NanoAir™ 10 Condensation Particle Counter (CPC) is a revolutionary new product from Particle Measuring Systems (PMS). It provides the sensitivity of a CPC with the ease of use and functionality of a traditional cleanroom particle counter. Designed to monitor ultra-clean environments, it delivers 10 nm detection sensitivity at a sample flow rate of 2.8 L/min (0.1 CFM). The NanoAir 10’s size is 83% smaller than competitive products making it practical to use anywhere in ultra-clean environments, including insideRead more
semiconductor process tools and equipment front-end modules (EFEM). The innovative patent-pending working fluid handling system design is robust and efficient, enabling 24/7, 365 days continuous operation without the need for maintenance or user intervention of any kind between the annually required working fluid refill and calibration. Thereby, reducing sampling and data collection interruptions and tool downtime. A 10-port manifold companion product (ParticleSeeker™) supports applications that require multiple sample locations to be monitored in sequential or programmed sequences. Additionally, the NanoAir is high-pressure gas compatible with the HPD-III from PMS, and data can be viewed, analyzed and reported using PMS Facility Net facility monitoring software or transmitted directly to third-party SCADA systems or process tool inputs.
Features
- Zero Count is <1.5 counts/m3 without the use of zero count subtraction schemes
- Counting efficiency at: 10 nm = 50% ± 20%, 15 nm = 100% ± 10%
- 83% smaller footprint than competitive products (16.5 x 20.2 x 15.2 cm)
- Working fluid refills necessary only 1x per year at annual calibration, capable of 15 months between refills with 24×7 full-time operation
- Sensitivity: ≥ 10 nm
- Sample Flowrate: 2.8 LPM (0.1 CFM)
- IP address and locations resident in base station enabling instrument “hot swap”
- 4-20mA
- USB ports (2): for Serial over USB (service port) & thumb drive
- Ethernet ports (2): for Ethernet Protocol & MODBUS over TCP/IP
- Ready for operation 20 minutes from powering on
- Data can be viewed, analyzed and reported using PMS Facility Net facility monitoring software or transmitted directly to third party SCADA systems or process tool inputs
- Sequential or programmed sequence monitoring (with ParticleSeeker 10-port sampler)
- High-pressure gas compatible
- Suitable for use in ISO Class 1 environments
Benefits
- Smallest in class size allows monitoring within process tools in the most critical functional areas and on congested high-pressure gas distribution utility pads
- Patent-pending working fluid handling system design is robust and efficient for 24/7/365 truly continuous operation without the need for user intervention and prevents sampling and data collection interruptions
- Best-in-class external volumetric size sets the standard for CPC’s designed for manufacturing and process control applications
- Does not use sheath airflow providing volumetric sampling capability
- No potential for unwanted fluid migration during shipping, handling, and installation that is common in other industrial-application CPCs
- No internal pumps or fans; eliminating maintenance and potential particle generation
- Capability to monitor multiple sample locations in a sequential or programmed sequence
Applications
- Point of Use (POU) monitoring in process areas
- Real-time continuous particle activity monitoring
- Use in semiconductor process tools and front-end equipment modules (EFEM)
NanoAir 10 + ParticleSeeker™ (10-port sampler):
- Monitoring inside process tool Equipment Front End Module (EFEM) minienvironments
- Ideal for applications requiring programmed sample point monitoring that follows the path of the wafer or other critical surface
- Broad area contamination monitoring up to 120m2 of fab/process space
NanoAir 10 + HPD™ III (for high-pressure inert gas monitoring):
- Using the NanoAir 10 particle counter with PMS’s HPD III (High-Pressure Diffuser) enables real-time, continuous, high-sensitivity measurement of high-pressure bulk gases.
Supporting Materials
Application Notes & Brochures
Selecting an Airborne Particle Counter >
An Analysis of Acceptable Particle Losses in Tubing >
Particle Loss in Tubing for Particle Counters with Different Flow Rates >
Airborne Molecular Contamination Monitoring Optimized for Lithography >
Airborne Molecular Contamination (AMC) Control in Advanced Lithography Applications >
FAQs
Available Accessories
ParticleSeeker™ Multiport Aerosol Sampler
The ParticleSeeker is a 10-port aerosol manifold companion to the NanoAir™ aerosol nanoparticle counter. Designed specifically for use in the most critical fab spaces, it is available for use in applications that require multiple sample locations to be monitored in a sequential or programmed sequence.
High-Pressure Diffuser (0.1 CFM)
The High-Pressure Diffuser lets you count particles in high-pressure gas lines by taking gas at pressures between 40 and 100psi and reducing it to a level acceptable to particle counters designed for atmospheric pressure.
Facility Net
Facility Net Software provides a solution for comprehensive environmental monitoring, including a real-time and historical data display. Compatible with Particle Measuring Systems particle counters and molecular contamination monitors, as well as various third-party products.
Related Products
ParticleSeeker™ Smart Manifold
The ParticleSeeker is a 10-port smart manifold companion to the NanoAir™ 10 aerosol nanoparticle counter.
High Pressure Diffuser: HPD™ III
Economical monitoring of non-toxic, non-flammable pressurized gases (CDA, N2, Ar, CO2) with atmospheric pressure particle counters.
Facility Net Monitoring Software
Real-time and historical data display for all Particle Measuring Systems particle counters, molecular contamination monitors and various third-party products.
Chemical Particle Counter: Chem 20™
World’s first 20 nm chemical particle counter, detects larger concentrations of particles with better statistics than competitive products.
Chemical Particle Counter: Chem 20™
World’s first 20 nm chemical particle counter, detects larger concentrations of particles with better statistics than competitive products.
0.1 Micron Particle Counter: Lasair® III 110
The only true .1 micron particle counter, providing real-time measurement of yield-impacting particles with three configurations.
AMC Monitoring: AirSentry® II Point-of-Use Ion Mobility Spectrometer
The AirSentry II AMC Monitoring family of ion mobility spectrometers for airborne molecular contamination (AMC) from Particle Measuring Systems detect and alert users to small concentrations or changes in airborne levels of chlorides, acids, amines and ammonia-containing species.
20 nm Liquid Particle Counter: Ultra DI® 20 Plus
Designed specifically for ultrapure water systems, this liquid particle counter’s low zero count, large sample volume and high counting efficiency provides contamination detection at 20 nm sensitivity.
