Sensitivity range: 10 nm, Flowrate: 2.8 LPM (0.1 CFM)
Purpose-built nanoparticle counter designed specifically for use in the most critical fab spaces.
The NanoAir™ 10 Condensation Particle Counter (CPC) is a revolutionary new product from Particle Measuring Systems (PMS). It provides the sensitivity of a CPC with the ease of use and functionality of a traditional cleanroom particle counter. Designed to monitor ultra-clean environments, it delivers 10 nm detection sensitivity at a sample flow rate of 2.8 L/min (0.1 CFM). The NanoAir 10’s size is 83% smaller than competitive products making it practical to use anywhere in ultra-clean environments, including insideFeatures
- Zero Count is <1.5 counts/m3 without the use of zero count subtraction schemes
- Counting efficiency at: 10 nm = 50% ± 20%, 15 nm = 100% ± 10%
- 83% smaller footprint than competitive products (16.5 x 20.2 x 15.2 cm)
- Working fluid refills necessary only 1x per year at annual calibration, capable of 15 months between refills with 24×7 full-time operation
- Sensitivity: ≥ 10 nm
- Sample Flowrate: 2.8 LPM (0.1 CFM)
- IP address and locations resident in base station enabling instrument “hot swap”
- 4-20mA
- USB ports (2): for Serial over USB (service port) & thumb drive
- Ethernet ports (2): for Ethernet Protocol & MODBUS over TCP/IP
- Ready for operation 20 minutes from powering on
- Data can be viewed, analyzed and reported using PMS Facility Net facility monitoring software or transmitted directly to third party SCADA systems or process tool inputs
- Sequential or programmed sequence monitoring (with ParticleSeeker 10-port sampler)
- High-pressure gas compatible
- Suitable for use in ISO Class 1 environments
Benefits
- Smallest in class size allows monitoring within process tools in the most critical functional areas and on congested high-pressure gas distribution utility pads
- Patent-pending working fluid handling system design is robust and efficient for 24/7/365 truly continuous operation without the need for user intervention and prevents sampling and data collection interruptions
- Best-in-class external volumetric size sets the standard for CPC’s designed for manufacturing and process control applications
- Does not use sheath airflow providing volumetric sampling capability
- No potential for unwanted fluid migration during shipping, handling, and installation that is common in other industrial-application CPCs
- No internal pumps or fans; eliminating maintenance and potential particle generation
- Capability to monitor multiple sample locations in a sequential or programmed sequence
Applications
- Point of Use (POU) monitoring in process areas
- Real-time continuous particle activity monitoring
- Use in semiconductor process tools and front-end equipment modules (EFEM)
NanoAir 10 + ParticleSeeker™ (10-port sampler):
- Monitoring inside process tool Equipment Front End Module (EFEM) minienvironments
- Ideal for applications requiring programmed sample point monitoring that follows the path of the wafer or other critical surface
- Broad area contamination monitoring up to 120m2 of fab/process space
NanoAir 10 + HPD™ III (for high-pressure inert gas monitoring):
- Using the NanoAir 10 particle counter with PMS’s HPD III (High-Pressure Diffuser) enables real-time, continuous, high-sensitivity measurement of high-pressure bulk gases.
Supporting Materials
Application Notes & Brochures
Selecting an Airborne Particle Counter >
An Analysis of Acceptable Particle Losses in Tubing >
Particle Loss in Tubing for Particle Counters with Different Flow Rates >
Airborne Molecular Contamination Monitoring Optimized for Lithography >
Airborne Molecular Contamination (AMC) Control in Advanced Lithography Applications >
FAQs
Available Accessories

ParticleSeeker™ Multiport Aerosol Sampler
The ParticleSeeker is a 10-port aerosol manifold companion to the NanoAir™ aerosol nanoparticle counter. Designed specifically for use in the most critical fab spaces, it is available for use in applications that require multiple sample locations to be monitored in a sequential or programmed sequence.

High-Pressure Diffuser (0.1 CFM)
The High-Pressure Diffuser lets you count particles in high-pressure gas lines by taking gas at pressures between 40 and 100psi and reducing it to a level acceptable to particle counters designed for atmospheric pressure.

Facility Net
Facility Net Software provides a solution for comprehensive environmental monitoring, including a real-time and historical data display. Compatible with Particle Measuring Systems particle counters and molecular contamination monitors, as well as various third-party products.