Tiếng Việt
Lasair III 110
0.1µm sensitivity · ISO 1-3
The highest-sensitivity airborne particle counter — the standard configuration for litho cleanrooms in sub-14 nm fabs. Detects submicron particles that 0.3µm counters miss.
SEMICONDUCTOR & MICROELECTRONICS
Contamination Monitoring Solutions for Semiconductor & Microelectronics Fabs
Reduce contamination, protect yield and improve process control with unmatched application expertise and industry-leading particle detection sensitivity — from Particle Measuring Systems, officially distributed in Vietnam by Techmaster.
“Solution hub for cleanroom airborne particle counters ISO 14644 for semiconductor fabs in Vietnam — Lasair III, Lasair Pro, IsoAir Pro, Airnet II, NanoAir 10.”
Industry-Leading Sensitivity
Unmatched particle detection sensitivity across every environment
10 nm
Air · Cleanroom air
10 nm
Gas · UHP gases
20 nm
DI Water · UPW
20 nm
Chemicals · Liquids
70 ppt
AMC · Molecular
Product Portfolio
5 airborne particle counter families for every need
Choose by cleanroom class, process criticality and deployment model — Techmaster recommends the optimal configuration for your fab.
1
Lasair® III Family — Floor-standing cleanroom particle counters
The gold standard for ISO Class 1-5 cleanrooms in semiconductor fabs. Fixed or portable trolley, sensitivity from 0.1µm.
Lasair III 310B
0.3µm sensitivity · 6 channels · ISO 4-5
6 measurement channels (0.3, 0.5, 1.0, 5.0, 10µm) — most popular at Samsung Vietnam, Intel and Hana Micron. Balances sensitivity and cost for 90% of fab applications.
Lasair III 310C
0.3-25µm size range
Wide size-range version for combined cleanroom and facility applications — covers HVAC inspection, particle fallout testing and overall monitoring.
Lasair III 350L
50 LPM flow · Large-volume fabs
50 LPM sampling flow (vs the standard 28.3 LPM) — cuts sampling time by 40% for fabs with large cleanroom volumes or 20-location ISO 14644-1 testing.
2
Lasair® Pro Family — Portable handheld counters
Lightweight rechargeable handhelds — built for cleanroom audits, HVAC validation, ISO 14644 spot-checks and routine GMP inspection.
Lasair Pro 310
Handheld 0.3µm · 2.83 LPM
Lightweight handheld particle counter for ISO 5-8 cleanroom checks, HVAC validation and GMP audits. Fast-charging lithium battery, touchscreen, 5,000-location memory.
Lasair Pro 350
Handheld · 50 LPM
50 LPM handheld — twice as fast as the 310 version. Ideal for auditing multiple cleanrooms in a single shift, saving 50% of on-site time.
Lasair Pro 5100
Handheld · 100 LPM
Massive 100 LPM flow — validate an entire fab in one shift. Built for Samsung- and Intel-scale semiconductor fabs where every hour of testing is costly.
3
IsoAir® Pro Family — Fixed 24/7 remote monitoring
Integrates with FacilityPro FMS with continuous data streaming — instant excursion detection and automated ISO 14644 / EU GMP Annex 1 compliance reporting.
IsoAir Pro-E
Ethernet TCP/IP connectivity
Fixed counter with Ethernet connectivity for areas with existing cabling. Integrates with FMS via TCP/IP, OPC UA, BACnet — the standard for new fab builds.
IsoAir Pro-Plus
Wireless · Flexible deployment
Wireless version for sub-14 nm semiconductor fabs — no cabling required, flexible deployment, AES-encrypted 2.4 GHz connectivity. Saves 70% of cabling cost.
IsoAir Pro
Economical entry version
Entry-level option for GMP pharmaceutical cleanroom projects on tighter budgets. Full PMS reliability at an optimized investment cost.
4
Airnet® II Family — Economical networked sensors
Lowest cost per measurement channel — facility-wide monitoring, deploying tens to hundreds of sensors across a single fab.
Airnet II 4-channel
4 size channels · Network
4-size-channel particle sensor with centralized network connectivity and the lowest cost per channel — ideal for dense facility-wide monitoring deployments.
Airnet II 2-channel (IIS)
2 channels 0.5µm + 5.0µm
More economical 2-channel version — sufficient for GMP pharma where EU GMP Annex 1 requires only 0.5µm and 5.0µm. About 30% lower cost than the 4-channel.
5
Compact & Sub-micron — NanoAir 10 + HandiLaz Mini II
Two ends of the market: a 10 nm ultra-deep counter for EUV lithography, and the lightest handheld for fast audits.
NanoAir™ 10
10-nanometer-sensitivity CPC
10 nm-sensitivity particle counter for ultra-clean EUV lithography environments — the only one on the market. Critical for fabs at 7 nm process nodes and below.
HandiLaz® Mini II
Economical compact handheld
The lightest handheld particle counter at an economical price for pharmaceutical and optics cleanroom audits. Under 1 kg, 8-hour battery life, XML/PDF report output.
Selection guide
How to choose a particle counter by ISO 14644 cleanroom class
Each class has its own particle limits and sensitivity requirements — choosing the right counter up front avoids insufficient sensitivity or wasted budget.
ISO CLASS 1-2
Litho EUV · Ion Implant
Process nodes below 14 nm. Requires submicron and ultrafine detection. The most critical cleanrooms in the fab.
ISO CLASS 3-5
Etch · CVD · CMP
Mainstream semiconductor front-end processes. Balances 0.3µm sensitivity and cost. The most common cleanroom class in a fab.
ISO CLASS 5-8
Assembly · Packaging · GMP
Back-end packaging and aseptic pharma. Lower requirements — prioritizes economy and high sensor density.
Software & FMS
Data integration, automated compliance
Every PMS airborne particle counter integrates natively with the FacilityPro and DataAnalyst software ecosystem — no middleware, no custom integration.
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FacilityPro FMS multi-sensor monitoringMonitor 1,000+ sampling points in real time, alarm management, 21 CFR Part 11 audit trail.
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DataAnalyst ISO 14644 reportingAutomatically generates classification, recovery test and particle deposition reports from templates.
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Standard industrial protocolsOPC UA, BACnet, Modbus TCP, MQTT — easy integration with existing BMS/SCADA.
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Global regulatory complianceISO 14644, ISO 21501-4, EU GMP Annex 1, USP 788/797, FDA 21 CFR Part 11.
Optimal configuration consulting for your fab
Techmaster Vietnam engineers provide free configuration consulting, on-site demos, and turnkey FMS proposals for your semiconductor cleanroom project.
