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Introduction Chemical Particle Counter PMS UltraChem 40
Sensitivity range: 40 – 125 nm
The PMS UltraChem 40 Chemical Particle Counter from Particle Measuring Systems gives you reliable liquid particle monitoring with the ability to detect 40 nm particles. This liquid particle monitoring solution is part of Particle Measuring Systems’ (PMS) complete line of particle counters for air, water, and chemical particle monitoring.
Features Chemical Particle Counter PMS UltraChem 40
- Compatible with a wide-range of chemicals
- 40 nm liquid particle monitoring sensitivity
- Chemicals include: PGMEA, photoresist solvents, hydrogen fluoride (HF) and sulfuric acid
- 3-year chemical particle counter warranty
- Solid state laser diode
- Simple design for efficient liquid particle monitoring
- Online or batch sampling capabilities
- Multiple communication protocols
Benefits Chemical Particle Counter PMS UltraChem 40
- Large sample volume for improved data quality
- Adaptive technology makes this chemical particle counter immune to most optical contamination See what your particle counter sees.
- Measures small particles in a wide range of chemicals, including high molecular scattering fluids
- Small footprint allows placement in various locations
- Quick diagnostics and random distribution alerts you to a real particle event
Applications
- DI water monitoring
- Chemical distribution monitoring
- Chemical quality assurance
- Immersion lithography
Specifications
| Size range | 40 – 125 nm |
| Size channels | 40, 70, 100, 125 nm |
| Flow rate | 5 ml/min |
| Sample volume | 2 ml/min nominal |
| Maximum concentration | 2,500 particles/ml, Monitor and Spectrometer mode
15,000 particles /ml, High-Scatter mode |
| Sample temperature | 50 – 302 °F (10 – 150 °C) |
| Zero count | < 20 counts/l |
| Laser source | Laser diode
Class I, complies with US 21 CFR 1040.10 and EN 60825-1; Internally an enclosed Class 4 laser is used per EN 60825-1 |
| Wetted surface materials | Sapphire, Teflon®, Kel-F® |
| Dimensions (d, w, h) | 17.5 x 18.75 x 11.75 in (68.9 x 47.6 x 29.8 cm) |
| Weight | 35 lb (16 kg) |
| Power | 100 – 240 VAC 1.25 Amp |
| Communications | Ethernet (PMS protocol)
4-20 mA RS-232 (for set up only) |
| Calibration | Materials used are traceable to National Institute of Standards and Technology (NIST) and/or Japanese Industrial Standards (JIS) |
| Environment | Temperature: 50 – 95 °F (10 – 35 °C)
Humidity: Non-condensing Indoor use only Pollution degree 2 Over-voltages (transients) Category II Ordinary protection (not protected against harmful ingress of moisture) Class I equipment (Electrical earth ground from the mains power source to the product input is required for safety) |
| Warranty | 3-year |
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