Chemical Particle Counter: UltraChem® 40

Sensitivity range: 40 – 125 nm

The UltraChem® 40 Chemical Particle Counter from Particle Measuring Systems gives you reliable liquid particle monitoring with the ability to detect 40 nm particles. This liquid particle monitoring solution is part of Particle Measuring Systems’ (PMS) complete line of particle counters for airwater, and chemical particle monitoring.

If your application requires monitoring small particles in chemicals with high molecular scatter, the UltraChem Chemical Particle Counter is the best tool for the job. NanoVision Technology eliminates the competition between the light scattered by fluid molecules and that from the particles. This makes 40 nm sizing possible for the first time. Background and false

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counts are a thing of the past. The NanoVision Technology breakthrough ensures only information that matches a particle fingerprint is counted. This results in data you can act on with confidence. Ultra Chem is also available in 100 nm model.

The UltraChem Chemical Particle Counter achieves this sensitivity in chemicals using a low-cost laser diode. The proven long life of the diode enables a three-year warranty (one-year warranty on electronic flow controller) for maximum confidence in your particle counter.

Get the performance you demand from a particle counter you can trust.

Learn about Particle Measuring Systems’ (PMS) full line of liquid particle counting solutions with industry leading sensitivity.

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Chemical Particle Counter: UltraChem® 40
Chemical Particle Counter: UltraChem® 40


  • Compatible with a wide-range of chemicals
  • 40 nm liquid particle monitoring sensitivity
  • Chemicals include: PGMEA, photoresist solvents, hydrogen fluoride (HF) and sulfuric acid
  • 3-year chemical particle counter warranty
  • Solid state laser diode
  • Simple design for efficient liquid particle monitoring
  • Online or batch sampling capabilities
  • Multiple communication protocols


  • Large sample volume for improved data quality
  • Adaptive technology makes this chemical particle counter immune to most optical contamination See what your particle counter sees.
  • Measures small particles in a wide range of chemicals, including high molecular scattering fluids
  • Small footprint allows placement in various locations
  • Quick diagnostics and random distribution alerts you to a real particle event


  • DI water monitoring
  • Chemical distribution monitoring
  • Chemical quality assurance
  • Immersion lithography

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Available Accessories

Facility Net

Facility Net

Facility Net Software provides a solution for comprehensive environmental monitoring, including a real-time and historical data display. Compatible with Particle Measuring Systems particle counters and molecular contamination monitors, as well as various third-party products.

Liquid Installation Kit

Liquid Installation Kit

For use with online  applications, the Liquid Installation Kit includes: a Flaretek® flaring tool, five caps, 25 ft of 1/4 in Perfluoroalkoxy alkanes (PFA) tubing and male connectors.

Particle Sensor Safety Cabinet

Particle Sensor Safety Cabinet

Houses the chemical particle sensor, detects chemical leaks with an external alarm, and provides secondary containment when a leak occurs. In the event of a chemical leak within the chemical particle counter or sample connections, the system will automatically detect the leak, shut off inlet and outlet sample valves, turn off power to the particle sensor, and provide an external alarm contact.

Particle Sensor Safety Cabinet for Solvent Applications

Particle Sensor Safety Cabinet for Solvent Applications

Provides chemical containment and safe operating conditions for the Chem 20™ and UltraChem® 40 or 100 chemical particle counting sensors.

Particle Sensor Mobile Cart Ultra Chem 40P

Particle Sensor Mobile Cart for UltraChem® 40P

Provides chemical containment and safe operating conditions for the UltraChem® 40P liquid chemical particle counting sensor, and is for solvent-specific applications.

Liquid Particle Mobile Cart

Liquid Particle Sensor Mobile Cart

Provides chemical (acid/base/oxidizer) containment and safe operating conditions for the UltraChem® 40 chemical particle counting sensor.

World’s first 20 nm chemical particle counter, detects larger concentrations of particles with better statistics than competitive products.


 Particle Counter for Chemicals: UltraChem® 100

The UltraChem® 100 Liquid Particle Counter gives you reliable contamination monitoring with the ability to detect particles as small as 100 nm in chemicals with high molecular scatter.

Particle Measuring Systems’ HSLIS-M65e liquid particle counter provides continuous, real-time monitoring of contamination levels in corrosive liquids, including hydrogen fluoride (HF).

A compression sampler combined with a LiQuilaz® particle counter for effective measurement of particles in fluids contained in unpressurized vessels.