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PMS UltraChem® 40 Chemical Particle Counter

Features

  • Compatible with a wide-range of chemicals
  • 40 nm liquid particle monitoring sensitivity
  • Chemicals include: PGMEA, photoresist solvents, hydrogen fluoride (HF) and sulfuric acid
  • 3-year chemical particle counter warranty
  • Solid state laser diode
  • Simple design for efficient liquid particle monitoring
  • Online or batch sampling capabilities
  • Multiple communication protocols
UltraChem 40 Spec

Introduction Chemical Particle Counter: PMS UltraChem® 40

Sensitivity range: 40 – 125 nm

The PMS UltraChem® 40 Chemical Particle Counter from Particle Measuring Systems gives you reliable liquid particle monitoring with the ability to detect 40 nm particles. This liquid particle monitoring solution is part of Particle Measuring Systems’ (PMS) complete line of particle counters for airwater, and chemical particle monitoring.

Chemical Particle Counter: UltraChem® 40

Features Chemical Particle Counter: PMS UltraChem® 40

  • Compatible with a wide-range of chemicals
  • 40 nm liquid particle monitoring sensitivity
  • Chemicals include: PGMEA, photoresist solvents, hydrogen fluoride (HF) and sulfuric acid
  • 3-year chemical particle counter warranty
  • Solid state laser diode
  • Simple design for efficient liquid particle monitoring
  • Online or batch sampling capabilities
  • Multiple communication protocols

Benefits Chemical Particle Counter: PMS UltraChem® 40

  • Large sample volume for improved data quality
  • Adaptive technology makes this chemical particle counter immune to most optical contamination See what your particle counter sees.
  • Measures small particles in a wide range of chemicals, including high molecular scattering fluids
  • Small footprint allows placement in various locations
  • Quick diagnostics and random distribution alerts you to a real particle event

Applications

  • DI water monitoring
  • Chemical distribution monitoring
  • Chemical quality assurance
  • Immersion lithography

Specifications

Size range 40 – 125 nm
Size channels 40, 70, 100, 125 nm
Flow rate 5 ml/min
Sample volume 2 ml/min nominal
Maximum concentration 2,500 particles/ml, Monitor and Spectrometer mode

15,000 particles /ml, High-Scatter mode

Sample temperature 50 – 302 °F (10 – 150 °C)
Zero count < 20 counts/l
Laser source Laser diode

Class I, complies with US 21 CFR 1040.10 and EN 60825-1; Internally an enclosed Class 4 laser is used per EN 60825-1

Wetted surface materials Sapphire, Teflon®, Kel-F®
Dimensions (d, w, h) 17.5 x 18.75 x 11.75 in (68.9 x 47.6 x 29.8 cm)
Weight 35 lb (16 kg)
Power 100 – 240 VAC 1.25 Amp
Communications Ethernet (PMS protocol)

4-20 mA

RS-232 (for set up only)

Calibration Materials used are traceable to National Institute of Standards and Technology (NIST) and/or Japanese Industrial Standards (JIS)
Environment Temperature: 50 – 95 °F (10 – 35 °C)

Humidity: Non-condensing

Indoor use only

Pollution degree 2

Over-voltages (transients) Category II

Ordinary protection (not protected against harmful ingress of moisture)

Class I equipment (Electrical earth ground from the mains power source to the product input is required for safety)

Warranty 3-year

Products of Particle Measuring Systems.

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