Liquid Particle Counter: HSLIS-M65e

Sensitivity range: 0.065 – 0.2 μm

The High Sensitivity Liquid in Situ (HSLIS-M65e) Liquid Particle Counter provides continuous, real-time monitoring of contamination levels in corrosive liquids, including hydrogen fluoride (HF).

A long standing and ever popular piece of Particle Measuring Systems‘ (PMS) complete liquid particle counting line, the HSLIS Liquid Particle Counter makes it easy to always understand the characteristics of your working fluid. The combination of high sensitivity and low cost makes it ideal when large numbers of sensors and/or long-term trending are required. Integration of the HSLIS Particle Counter into Particle Measuring Systems’ Facility Net Software provides an economical way to monitor

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multiple flow systems and provide dedicated local display and control capabilities.

Find the right particle counter for your application by using Particle Measuring Systems’ (PMS) particle counter finder tool.

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  • 4 channel liquid particle counter
  • 0.065, 0.1, 0.15 and 0.2 μm particle size range
  • Operates with an optimal flow rate of 100 ml/min. +/-10%
  • Samples 0.6% of the flow volume or 0.6 ml/min
  • Compatible with corrosive liquids, including hydrogen fluoride (HF)
  • eSeries compatible with Facility Net Software
  • Existing network can be utilized with ethernet communication to Facility Net Software


Sensitivity range: 0.065 – 0.2 µm



  • Particle Monitoring chemical delivery systems
  • Measuring filter efficiency
  • Episodic event tracking and alarming
  • Continuous system particle monitoring

Supporting Materials

Specification Sheets

HSLIS M65 ANSI/ISA-Compatible Liquid Particle Counter >

HSLIS e-Series Liquid Optical Particle Counter > 

Application Notes & Brochures

Statistical Analysis: Liquid-Borne Particles >


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Available Accessories

Facility Net

Facility Net

Facility Net Software provides a solution for comprehensive environmental monitoring, including a real-time and historical data display. Compatible with Particle Measuring Systems particle counters and molecular contamination monitors, as well as various third-party products.

Liquid Installation Kit

Liquid Installation Kit

For use with online  applications, the Liquid Installation Kit includes: a Flaretek® flaring tool, five caps, 25 ft of 1/4 in Perfluoroalkoxy alkanes (PFA) tubing and male connectors.

Particle Sensor Safety Cabinet

Particle Sensor Safety Cabinet

Houses the chemical particle sensor, detects chemical leaks with an external alarm, and provides secondary containment when a leak occurs. In the event of a chemical leak within the chemical particle counter or sample connections, the system will automatically detect the leak, shut off inlet and outlet sample valves, turn off power to the particle sensor, and provide an external alarm contact.

Capillary Cleaning Kit

Capillary Cleaning Kit

The Capillary Cleaning Kit flushes capillaries with a Flaretek® adapter and contains: two 10cc syringes and two Flaretek® tube fittings.

Downstream Flow Controller

Downstream Flow Controller

Complete flow control through a liquid particle counter is critical to ensure accurate and actionable data. The Downstream Flow Controllers, FC-200 and FC-100, are the perfect complement to our high precision liquid particle counters.

A compression sampler combined with a LiQuilaz® particle counter for effective measurement of particles in fluids contained in unpressurized vessels.

World’s first 20 nm chemical particle counter, detects larger concentrations of particles with better statistics than competitive products.