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The SLS Syringe Liquid Particle Sampler from Particle Measuring Systems uses a precision syringe and simple flow-path for delivering chemical samples from a sample vessel or chemical container, directly to the particle sensor. It is ideal for applications where precise, small-volume particle batch sampling is required, where the sampler device cannot contribute contamination to the chemical sample.
The system consists of a selectable syringe for either corrosive or non-corrosive liquids, a selectable particle counter for different sizing sensitivities, and batch-sampling software. The following SLS product systems are available:
|
Particle Sampler Name |
SLS-20 |
SLS-1040 |
SLS-1100 |
SLS-1200 |
SLS-1300 |
SLS-1500 |
SLS-2000 |
|
Particle Counter |
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|
Minimum Particle Size |
20 nm |
40 nm |
100 nm |
0.2 μ |
0.3 μ |
0.5 μ |
100 μm |
|
Particle Size Range |
20 to 100 nm |
40 to 125 nm |
100 to 500 nm |
0.2 to 2.0 μm |
0.3 to 3.0 μm |
0.5 to 20 μm |
1.5 to 125 μm (E15) 2.0 to 125 μm (E20P) |
|
# Size Channels |
4 |
4 |
4 |
15 |
15 |
15 |
15 |
|
Instrument Flow Rate |
35 ml/min |
5 ml/min |
20 ml/min |
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Sample Flow Rate |
0.45 ml/min |
2 ml/min |
6 ml/min |
20 ml/min |
20 ml/min |
20 ml/min |
20 ml/min |
Benefits
- Precise particle measurement
- Versatile – select various particle sensors and syringe sizes
- Cost-effective
- Easy-to-use
- Small sample volume – eliminates sample waste
Applications
- Diverse applications in semiconductor and process chemical manufacturing
- Incoming quality measurement of process chemicals
- Point-of-process monitoring on process tools
- Testing and qualification of chemical components
- Outgoing chemical qualification testing
- Mechanical parts cleanliness testing
Supporting Materials
FAQs
What is the cleaning method for the SLS 1000? >
What is the floss cleaning method for the SLS 1000? >
Available Accessories
SamplerSight Pharma Software
Designed to collect data from the LiQuilaz Particle Sensor, SamplerSight Pharma Software controls syringe-operated samplers, allowing operators to manage sampling requirements for batch-based operations with a comprehensive view of the batch information.
SLS Cleaning Kit
Syringe Liquid Sampler cleaning kit
Spare Syringe (1ml-25ml)
Spare syringe for revision D and higher LS-200 and revision C and higher LS-50 samplers.
Magnetic Stirrer with Cable
Magnetic stirrer with cable for mixing samples during syringe sampling.
Related Products
Liquid Particle Counter for Chemicals: UltraChem 100™
The UltraChem 100 Liquid Particle Counter gives you reliable contamination monitoring with the ability to detect particles as small as 10 nm in chemicals with high molecular scatter.
Chemical Particle Counter: UltraChem 40™
The UltraChem® 40 Chemical Particle Counter from Particle Measuring Systems detect 40 nm particles in chemicals with high molecular scatter.
Syringe Liquid Particle Sampler: SLS-20
For batch sampling applications using Chem 20 and Chem 20-HI particle counters
