Syringe Liquid Particle Sampler: SLS

The SLS Syringe Liquid Particle Sampler from Particle Measuring Systems uses a precision syringe and simple flow-path for delivering chemical samples from a sample vessel or chemical container, directly to the particle sensor. It is ideal for applications where precise, small-volume particle batch sampling is required, where the sampler device cannot contribute contamination to the chemical sample.

The system consists of a selectable syringe for either corrosive or non-corrosive liquids, a selectable particle counter for different sizing sensitivities, and batch-sampling software. The following SLS product systems are available:

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Syringe Liquid Particle Sampler: SLS
Syringe Liquid Sampler SLS-20
SLS-20 Chem 20

Particle Sampler Name








Particle Counter

Chem 20

UltraChem 40

UltraChem 100

LiQuilaz S02

LiQuilaz S03

LiQuilaz S05

LiQuilaz E15 or E20P

Minimum Particle Size

20 nm

40 nm

100 nm

0.2 μ

0.3 μ

0.5 μ

100 μm

Particle Size Range

20 to 100 nm

40 to 125 nm

100 to 500 nm

0.2 to 2.0 μm

0.3 to 3.0 μm

0.5 to 20 μm

1.5 to 125 μm (E15) 2.0 to 125 μm (E20P)

# Size Channels








Instrument Flow Rate

35 ml/min

5 ml/min

20 ml/min

Sample Flow Rate

0.45 ml/min

2 ml/min

6 ml/min

20 ml/min

20 ml/min

20 ml/min

20 ml/min


  • Proven Particle Measuring Systems’ Chem 20, UltraChem or Liquilaz particle counters
  • Menu-driven data collection – 1, 5, 10 and 25 ml
  • Wetted materials compatible with corrosive chemicals
  • Compact design with on-board particle sensor


  • Precise particle measurement
  • Versatile – select various particle sensors and syringe sizes
  • Cost-effective
  • Easy-to-use
  • Small sample volume – eliminates sample waste


  • Diverse applications in semiconductor and process chemical manufacturing
  • Incoming quality measurement of process chemicals
  • Point-of-process monitoring on process tools
  • Testing and qualification of chemical components
  • Outgoing chemical qualification testing
  • Mechanical parts cleanliness testing

Supporting Materials


What is the cleaning method for the SLS 1000? >

What is the floss cleaning method for the SLS 1000? >

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Available Accessories

SamplerSight Pharma Software

SamplerSight Pharma Software

Designed to collect data from the LiQuilaz Particle Sensor, SamplerSight Pharma Software controls syringe-operated samplers, allowing operators to manage sampling requirements for batch-based operations with a comprehensive view of the batch information.

SLS Cleaning Kit

Syringe Liquid Sampler cleaning kit

Spare Syringe (1ml-25ml)

Spare Syringe (1ml-25ml)

Spare syringe for revision D and higher LS-200 and revision C and higher LS-50 samplers.

Magnetic Stirrer with Cable

Magnetic Stirrer with Cable

Magnetic stirrer with cable for mixing samples during syringe sampling.

 Particle Counter for Chemicals: UltraChem® 100

Liquid Particle Counter for Chemicals: UltraChem 100™

The UltraChem 100 Liquid Particle Counter gives you reliable contamination monitoring with the ability to detect particles as small as 10 nm in chemicals with high molecular scatter. 

The UltraChem® 40 Chemical Particle Counter from Particle Measuring Systems detect 40 nm particles in chemicals with high molecular scatter.

For batch sampling applications using Chem 20 and Chem 20-HI particle counters