Tiếng Việt
Sensitivity range: 0.2 – 20 µm
LiQuilaz® II optical liquid particle counter is a volumetric monitor with a variety of sizing sensitivities as low as 0.2 µm. It provides high precision analysis for most process chemicals, including hydrofluoric acid and hot corrosive chemicals up to 306 °F (152 °C).
A unique solution in the comprehensive line of liquid particle counters, the LiQuilaz II particle counter by Particle Measuring Systems provides the same levels of accuracy, reliability and repeatability that customers have received from our instruments for many years. LiQuilaz II liquid particle counter features both RS-485 and Ethernet network communications.
Read more
Volumetric particle counting offers the highest precision possible by measuring 100% sample volumes (up to 80 ml/min) so that short sampling intervals can be utilized without sacrificing statistical significance.
Find the right particle counter for your application by using Particle Measuring Systems’ (PMS) particle counter finder tool.
Features
- 0.2 – 20.0 μm particle counter size range
- Up to 80 ml/min flow rate
- Compatible with a wide range of process chemicals
- Small footprint for easy placement anywhere in the process
- User-selected particle size threshold
Benefits
S02: 0.2 – 2.0 µm, S03: 0.3 – 3.0 µm, S05: 0.5 – 20.0 µm
Applications
- In-line and batch sampling capabilities
- Effervescent chemical measurements using compression sampling
- Chemical quality assurance
- Process bath monitoring
- DI water monitoring
- Chemical delivery systems
- Photoresist monitoring
Supporting Materials
Application Notes & Brochures
Particle Counter Sizing Accuracy: LiQuilaz-S
LiQuilaz® II Maintenance: Capillary Cleaning Procedure
Improve yield and quality by monitoring particle contamination during optics manufacturing
FAQs
How do I clean the capillary for a LiQuilaz® SO2, SO3 or SO5 Liquid Particle Counter?
Available Accessories
Facility Net
Facility Net Software provides a solution for comprehensive environmental monitoring, including a real-time and historical data display. Compatible with Particle Measuring Systems particle counters and molecular contamination monitors, as well as various third-party products.
Liquid Installation Kit
For use with online applications, the Liquid Installation Kit includes: a Flaretek® flaring tool, five caps, 25 ft of 1/4 in Perfluoroalkoxy alkanes (PFA) tubing and male connectors.
Particle Sensor Safety Cabinet
Houses the chemical particle sensor, detects chemical leaks with an external alarm, and provides secondary containment when a leak occurs. In the event of a chemical leak within the chemical particle counter or sample connections, the system will automatically detect the leak, shut off inlet and outlet sample valves, turn off power to the particle sensor, and provide an external alarm contact.
Capillary Cleaning Kit
The Capillary Cleaning Kit flushes capillaries with a Flaretek® adapter and contains: two 10cc syringes and two Flaretek® tube fittings.
Communication Accessories
The LiQuilaz Particle Counter communicates via RS-485 protocol, so communication accessories are required.Depending on the configuration, you may need two cables and a BB485 converter. If the LiQuilaz instruments are daisy-chained (i.e. connected in series), a standard nine-pin serial cable can connect the two instruments.If the computer does not have a nine-pin serial port, a USB-to-serial converter is also required.
Corrosive Liquid Sampler Installation Kit
The Corrosive Liquid Sampler Installation Kit includes: one Flaretek® flaring tool, three caps, 25ft of 1/4in Perfluoroalkoxy alkanes (PFA) tubing and 10ft of 1/4in poly flow tubing.
Downstream Flow Controller
Complete flow control through a liquid particle counter is critical to ensure accurate and actionable data. The Downstream Flow Controllers, FC-200 and FC-100, are the perfect complement to our high precision liquid particle counters.
Related Products
Chemical Particle Counter: Chem 20™
World’s first 20 nm chemical particle counter, detects larger concentrations of particles with better statistics than competitive products.
Chemical Particle Counter: Chem 40™
The UltraChem® 40 Chemical Particle Counter from Particle Measuring Systems detect 40 nm particles in chemicals with high molecular scatter.
Corrosive Liquid Particle Sampler: CLS-700
A compression sampler combined with a LiQuilaz® particle counter for effective measurement of particles in fluids contained in unpressurized vessels.
