Tiếng Việt
Ultra-High-Purity Gas Particle Counter HPGP™ 101-C
Reliable in-line contamination monitoring for process gases at line pressure up to 150 psig
The HPGP 101-C high-pressure gas particle counter samples directly at line pressure up to 150 psig, detecting particles down to 0.1 µm. It is compatible with O₂, H₂ and most non-toxic gases, and is suited to reactive-gas applications. Paired with the PDS-E data system for continuous monitoring and full data retrieval, the HPGP 101-C delivers particle monitoring for semiconductor gas systems — verifying ultra-high-purity gas right at the point of use.
Product Gallery PRODUCT GALLERY
HPGP 101-C — overview
UHP gas measurement unit
PDS-E data system
HPGP 101-C + PDS-ESemiconductor applicationSpecifications SPECIFICATIONS
| Parameter | Value |
|---|---|
| Sensitivity range | 0.1 – 5.0 µm |
| Particle-size channels | 8 channels: 0.1 / 0.2 / 0.3 / 0.5 / 1.0 / 2.0 / 3.0 / 5.0 µm |
| Sample flow rate | 0.1 SCFM (2.8 LPM) |
| Counting efficiency | > 50% at 0.14 µm |
| Line pressure | 40 – 150 psig (2.8 – 10.3 bar) |
| Optical design | Passive cavity, 90° wide-angle scattering, parallel-processing array detector |
| Light source | HeNe laser |
| Gas compatibility | O₂, H₂ and most non-toxic gases; reactive-gas capable |
| Safety | Containment vessel, inert-gas purge, power cut-off on sample-gas leak |
| Data system | PDS-E (Particle Data System – Ethernet): RS-232, Ethernet (PMS protocol, Modbus TCP, OPC) |
| Software | FacilityNet™ — data management, reporting & alarms |
| Calibration | NIST-traceable standards |
| Power | 100 – 240 VAC, 50 – 60 Hz |
| Operating environment | 0 – 45 °C, non-condensing humidity |
| Dimensions & weight | HPGP: 66 × 20 × 23 cm / 20.4 kg · PDS-E: 18 × 22 × 32 cm / 5.2 kg |
| Model | HPGP-101-C |
ROI Calculator — Estimate Your HPGP 101-C Investment Value
A single undetected 0.1 µm particle event can ruin dozens of wafers. Enter your fab data:
→ At ~$50-150K, estimated ROI 3-6 months
⚠️ Indicative estimate. Contact Techmaster for a detailed ROI analysis.
Industries & Applications 5 USE CASES
5 deployment scenarios for the HPGP 101-C in process-gas contamination control — from semiconductor fabs to industrial gas fill plants.
Semiconductor Manufacturing
Point-of-use UHP gas monitoring
The HPGP 101-C measures ultra-high-purity gas directly at line pressure, catching 0.1 µm particles before they reach the wafer during lithography, etch and deposition.
Gas Distribution Systems
Pipeline qualification & commissioning
Shorten qualification and validation of new gas distribution systems — measure at operating pressure and eliminate false counts from external pressure reducers.
Reactive & Specialty Gas
Reactive gas, O₂ and H₂ monitoring
A passive optical cavity plus containment vessel and inert-gas purge let the HPGP work with O₂, H₂ and reactive gases where other technologies are unsuitable.
Electronics & Display
OLED / display — N₂ box monitoring
Keep the inert atmosphere inside N₂ boxes and clean-packaging chambers particle-free, protecting OLED panels and sensitive components from particulate contamination.
Industrial Gas & Fill Plants
Bottled-gas quality verification
Industrial gas producers use the HPGP 101-C to verify that bottled / cylinder gas meets particle-cleanliness limits before delivery to fab customers.
Where It Fits in the PMS Portfolio CHOOSE THE RIGHT TOOL
| Criteria | HPGP 101-C (Gas) | Airborne (Lasair/Airnet) | Liquid (LiQuilaz) | Molecular (AirSentry) |
|---|---|---|---|---|
| Phase / medium | High-pressure process gas | Cleanroom air | Liquids & chemicals | Molecular contamination (AMC) |
| Particle sensitivity | 0.1 µm | to 10 nm | to 20 nm | 70 ppt |
| Hallmark | Direct sampling at 150 psig | Airborne particle counting | Particles in water/chemicals | AMC molecular detection |
| Line pressure | 40 – 150 psig | Atmospheric | — | Atmospheric |
| Typical use | UHP gas at point of use | Cleanroom classification & monitoring | UPW / wet chemicals | AMC monitoring in fabs |
| O₂ / H₂ compatible | Yes | — | — | — |
Gas Particle Measurement Methods OBJECTIVE
| Criteria | HPGP 101-C (direct, high-pressure) | Sampling via pressure reducer | Conventional portable gas counter |
|---|---|---|---|
| Sampling pressure | Direct 40 – 150 psig | Must reduce to ~atmospheric | Atmospheric |
| False counts | Minimal — no reducer | High — from valves/reducer | High |
| Sensitivity | 0.1 µm | Device-dependent | Typically 0.3 – 0.5 µm |
| O₂ / H₂ / reactive gas | Compatible (containment vessel) | Limited | Usually no |
| Continuous in-line integration | Yes (PDS-E + FacilityNet) | Partial | No — spot checks |
| Data & compliance | Continuous, NIST-traceable | Varies | Manual |
| Suitable for UHP fab | Yes | Limited | No |
Methodological comparison based on the published specifications of the HPGP 101-C. Please confirm the actual configuration with the Techmaster team.
Key Benefits 4 KEY BENEFITS
Direct measurement up to 150 psig
Sample inside the high-pressure gas stream itself — eliminating false counts from external reducers and reflecting true process conditions.
Safe with O₂, H₂ & reactive gases
Passive optical cavity, containment vessel and inert-gas purge; power cuts off automatically on sample-gas leak into the vessel.
Faster start-up & validation
Detecting 0.1 µm particles early raises yield and cuts gas-distribution-system qualification time.
Continuous data with PDS-E
Integrates with FacilityNet for storage, reporting and instant alarms; Ethernet / Modbus / OPC, NIST-traceable.
Why Choose Techmaster DISTRIBUTOR USP
★ AUTHORIZED
Authorized PMS Distributor
Hàng chính hãng 100% từ trụ sở PMS Boulder, Colorado — kèm chứng nhận xuất xứ cho mỗi đơn hàng.
ISO/IEC 17025 Lab (ANAB)
Calibration right here in Vietnam — saving 4–8 weeks versus sending abroad, while staying fully traceable.
PMS-Certified Engineers
A technical team trained directly at PMS headquarters — deep expertise across every product line.
2 Branches in Vietnam
Văn phòng TP. HCM phục vụ miền Nam, Bắc Ninh phục vụ miền Bắc — giao hàng, lắp đặt cực nhanh.
On-site Service & Rental
Fast on-site response — repair, calibration, and backup-unit rental while your main unit is under maintenance.
Technical Hotline
Direct phone support during business hours — applications, configuration and troubleshooting.
Frequently Asked Questions FAQ
What gases can the HPGP 101-C measure?
It is compatible with O₂, H₂ and most non-toxic gases (N₂, Ar, He, CDA…), and works in many reactive-gas applications thanks to its passive optical cavity and containment vessel.
What is the sensitivity and how many channels does it have?
It detects particles from 0.1 to 5.0 µm across 8 channels (0.1 / 0.2 / 0.3 / 0.5 / 1.0 / 2.0 / 3.0 / 5.0 µm), with > 50% counting efficiency at 0.14 µm.
What is the maximum line pressure it works at?
From 40 to 150 psig (2.8 – 10.3 bar). It samples directly in the high-pressure gas stream, with no external pressure reducer required.
What is PDS-E and how does it connect?
The PDS-E (Particle Data System – Ethernet) collects and reports data from the HPGP probe. It communicates over RS-232 and Ethernet (PMS protocol, Modbus TCP or OPC) and integrates with FacilityNet software.
Can it safely measure pure oxygen and hydrogen?
Yes. The passive optical cavity, inert-gas purge and automatic power cut-off on a sample-gas leak let the HPGP work safely with O₂ and H₂.
What is the sample flow rate?
0.1 SCFM (equivalent to 2.8 LPM).
How often should it be calibrated?
Annual calibration at an authorized Particle Measuring Systems center is recommended; the calibration standards are NIST-traceable.
What is the biggest differentiator of the HPGP 101-C?
Its ability to measure directly at pressures up to 150 psig while keeping 0.1 µm sensitivity — something conventional portable gas particle counters cannot do.
Ready to take control of gas contamination with the HPGP 101-C?
The Techmaster engineering team is ready to configure the HPGP 101-C + PDS-E for your gas system — get a quote for genuine PMS equipment in Vietnam.
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Updated: May 2026 · ✍️ Written by the Techmaster technical team — authorized Particle Measuring Systems distributor in Vietnam.
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