The ParticleSeeker is a 10-port smart manifold companion to the NanoAir™ aerosol nanoparticle counter.

The ParticleSeeker is a 10-port smart manifold companion to the NanoAir™ 10 aerosol nanoparticle counter.

Designed specifically for use in the most critical fab spaces, it is available for use in applications that require multiple sample locations to be monitored in a sequential or programmed sequence. The ParticleSeeker makes it uniquely possible to monitor inside process tool equipment Front End Module (EFEM) minienvironments. Together, the ParticleSeeker and NanoAir 10 provide the ability to monitor up to 120m2 of fab/process space when using all 10 manifold ports.

Download Spec Sheet Request a Quote
NanoAir Seeker base in less top
Seeker front
Seeker side pullout

Features

  • 10 manifold points
  • Sample flowrate: 0.1 CFM
  • Sample interval: Min 1 second, Max 3600 seconds
  • Up to 120m2 of fab/process space sampling coverage
  • LED’s indicate active sampling port(s)
  • Multiple (4) sampling modes
    » Ensemble: samples all ports simultaneously
    » Seeker: targets any port that is identified during ensemble operation
    » Synch: communicates with process tool in real-time to follow fab process (wafer path) through process tools and mini-environments
    » User-Defined
  • Small footprint: 8.2 x 5.4 x 4.7 in (21x14x12 cm)
  • Instrument IP address and locations stay with the base station allowing it to swap with minimal downtime (< 5 mins)
  • Dry Contact relay (x4)
  • 4-20mA analog inputs (x4) and outputs (x2) for additional sensors (ex: temp., RH, DAP)
  • USB port
  • Ethernet ports (2): Ethernet Protocol & MODBUS over TCP/IP

Benefits

  • Provides 120m2 of fab/process space sampling coverage
  • Only aerosol particle manifold on the market designed and purpose-built for use with sample nanoparticles (<100nm).
  • Eliminates crosstalk and other common nanoparticle transport handling problems
  • Capability to monitor multiple sample locations in a sequential or programmed sequence
  • Multiple Input/output communication interfaces enable seamless SCADA data transfer reducing process tool downtime
  • DC Power ports (x2) allow ParticleSeeker to share power with a NanoAir

Applications

ParticleSeeker + NanoAir 10 (aerosol particle counter):

  • Monitoring inside process tool Equipment Front End Module (EFEM) minienvironments
  • Ideal for applications requiring programmed sample point monitoring that follows the path of the wafer or other critical surface
  • Broad contamination monitoring when using multiple manifold ports

Supporting Materials

Specification Sheets

ParticleSeeker™ Smart Manifold >

NanoAir™ 10 nm Aerosol Particle Counter >

FMS Configuration Examples >

FacilityPro® Processors >

FacilityPro® Software >

FAQs

Submit A Question

Available Accessories

Facility Net

Facility Net

Facility Net Software provides a solution for comprehensive environmental monitoring, including a real-time and historical data display. Compatible with Particle Measuring Systems particle counters and molecular contamination monitors, as well as various third-party products.

Related Products

NanoAir right lights

The sensitivity of a CPC with the ease of use and functionality of a traditional cleanroom particle counter. Purpose-built for year-long continuous monitoring.

Facility Net

Real-time and historical data display for all Particle Measuring Systems particle counters, molecular contamination monitors and various third-party products.

Chemical Particle Counter: Chem 20™

World’s first 20 nm chemical particle counter, detects larger concentrations of particles with better statistics than competitive products.

0.1 Micron Particle Counter: Lasair® III 110

The only true .1 micron particle counter, providing real-time measurement of yield-impacting particles with three configurations.

The only true .1 micron particle counter, providing real-time measurement of yield-impacting particles with three configurations.

The AirSentry II AMC Monitoring family of ion mobility spectrometers for airborne molecular contamination (AMC) from Particle Measuring Systems detect and alert users to small concentrations or changes in airborne levels of chlorides, acids, amines and ammonia-containing species.

Airnet II Particle Sensor

The Airnet II 4 Channel Particle Sensor meets the specifications of ISO 21501-4 and EU GMP Annex 1 to measure the size and number of particles suspended in the air for real-time monitoring of defect-causing particles.

Ultra DI® 20 Plus Liquid Optical Particle Counter

Designed specifically for ultrapure water systems, this liquid particle counter’s low zero count, large sample volume and high counting efficiency provides contamination detection at 20 nm sensitivity.