High-Purity Process Chemicals

A Comprehensive Solution for the Control of Particle Contamination

With industry-leading 20 nm sensitivity, the Chem 20™ chemical particle counter provides a comprehensive solution for the control and mitigation of particle contamination at 20 nm in High Purity Chemical applications. The use-cases presented here show how the Chem 20 can be utilized throughout the microelectronics industry in a variety of applications at semiconductor manufacturers, chemical suppliers, and at tool and component suppliers.

Read the paper to learn about:

• Particle Measuring Systems‘ leading-edge technology for particle testing for semiconductor devices
• Control and mitigation of potentially yield-impacting particle contamination
• Use-case testing of various processes for chemical suppliers