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Introduction Corrosive Liquid Particle Sampler PMS CLS 700T
The PMS CLS 700T Corrosive Liquid Particle Sampler is a compression sampler combined with a LiQuilaz® particle counter for effective measurement of particles in fluids contained in unpressurized vessels. It is ideally suited for testing effervescent chemicals. The system eliminates bubbles by pressurizing the sample and forcing the bubbles into solution. It can be integrated into a wet bench for continuous particle monitoring, or located on a cart for increased mobility. When integrated into the wet bench, the sampling system can be started or stopped by the tool, including automatic shutoff during a bath change, to prevent the injection of chemical foam or air into the particle counter. It is fully compliant with SEMI C1 for particle measurement of process chemicals.
- Uses vacuum to fill sample vessel, then pressurizes to count particles without bubbles
- Comprised of materials compatible with most process chemicals
- Enables efficient sampling of chemicals from sample bottles, chemical containers, or process baths
Benefits Corrosive Liquid Particle Sampler CLS 700T
Versatility
- Supports a wide range of applications and fluids
- Programmable particle-size thresholds
- Designed for easy mobility
- Compression sampling allows instrument tomeasure most chemicals, including effervescent ones
- External trigger coordinates sampling with process events
- Measurements can be made directly out of the bath
User-Friendly
- Facility Net process control software simplifies online sampling by providing alphanumeric paging, sensor status, tabular and SPC charts, and time plots
- SamplerSight batch sampling software facilitates all aspects of data management, including sophisticated data storage, retrieval, and report generation
- Designed for quick cleanup when switching from one liquid to another
Cost Reduction
- 100% view volume means quicker process qualification
- Real-time characterization and analysis for immediate response to anomalies means less waste
Applications
- Particle level measurement in effervescent liquids
- Process monitoring of wafer cleaning baths
- Chemical process monitoring
- Sampling of parts cleaning vessels
Products of Particle Measuring Systems.
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