Chemical Particle Counter: UltraChem® 40

UltraChem 40 Chemical Particle Counter

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Features

Compatible with a wide-range of chemicals
40 nm liquid particle monitoring sensitivity
Chemicals include: PGMEA, photoresist solvents, hydrogen fluoride (HF) and sulfuric acid
3-year chemical particle counter warranty
Solid state laser diode
Simple design for efficient liquid particle monitoring
Online or batch sampling capabilities
Multiple communication protocols

Introduction Chemical Particle Counter PMS UltraChem 40

Sensitivity range: 40 – 125 nm

The PMS UltraChem 40 Chemical Particle Counter from Particle Measuring Systems gives you reliable liquid particle monitoring with the ability to detect 40 nm particles. This liquid particle monitoring solution is part of Particle Measuring Systems’ (PMS) complete line of particle counters for air, water, and chemical particle monitoring.

Features Chemical Particle Counter PMS UltraChem 40

Compatible with a wide-range of chemicals
40 nm liquid particle monitoring sensitivity
Chemicals include: PGMEA, photoresist solvents, hydrogen fluoride (HF) and sulfuric acid
3-year chemical particle counter warranty
Solid state laser diode
Simple design for efficient liquid particle monitoring
Online or batch sampling capabilities
Multiple communication protocols

Benefits Chemical Particle Counter PMS UltraChem 40

Large sample volume for improved data quality
Adaptive technology makes this chemical particle counter immune to most optical contamination See what your particle counter sees.
Measures small particles in a wide range of chemicals, including high molecular scattering fluids
Small footprint allows placement in various locations
Quick diagnostics and random distribution alerts you to a real particle event

Applications

DI water monitoring
Chemical distribution monitoring
Chemical quality assurance
Immersion lithography

Specifications

Size range	40 – 125 nm
Size channels	40, 70, 100, 125 nm
Flow rate	5 ml/min
Sample volume	2 ml/min nominal
Maximum concentration	2,500 particles/ml, Monitor and Spectrometer mode 15,000 particles /ml, High-Scatter mode
Sample temperature	50 – 302 °F (10 – 150 °C)
Zero count	< 20 counts/l
Laser source	Laser diode Class I, complies with US 21 CFR 1040.10 and EN 60825-1; Internally an enclosed Class 4 laser is used per EN 60825-1
Wetted surface materials	Sapphire, Teflon®, Kel-F®
Dimensions (d, w, h)	17.5 x 18.75 x 11.75 in (68.9 x 47.6 x 29.8 cm)
Weight	35 lb (16 kg)
Power	100 – 240 VAC 1.25 Amp
Communications	Ethernet (PMS protocol) 4-20 mA RS-232 (for set up only)
Calibration	Materials used are traceable to National Institute of Standards and Technology (NIST) and/or Japanese Industrial Standards (JIS)
Environment	Temperature: 50 – 95 °F (10 – 35 °C) Humidity: Non-condensing Indoor use only Pollution degree 2 Over-voltages (transients) Category II Ordinary protection (not protected against harmful ingress of moisture) Class I equipment (Electrical earth ground from the mains power source to the product input is required for safety)
Warranty	3-year