Tiếng Việt
Lasair Pro 310
Handheld 0.3 µm · 2.83 LPM
Standard handheld for ISO 5-8 optics cleanroom audits, HVAC validation and ISO 14644-1 certification. Fast-charging lithium battery, 5,000-location memory.
OPTICS & PHOTONICS
Particle Measurement Solutions for Precision Optics, Lasers & Photonics
Protect precision optics, lens/mirror cleanrooms, sensors and laser sources from submicron contamination — the shorter the wavelength and the higher the laser energy density, the more any particle can destroy a component. Particle Measuring Systems keeps your optics cleanroom perfectly clean — officially distributed in Vietnam by Techmaster.
“Solution hub for particle measurement in optics, laser, lens, mirror and photonics-sensor cleanrooms Vietnam — Lasair Pro, Lasair III, IsoAir Pro, NanoAir 10, Chem 20, AirSentry II AMC.”
Precision Optics Sensitivity
Sensitivity that catches every contaminant that causes laser damage
10 nm
Air · DUV/EUV optics
10 nm
Gas · UHP N2/Ar
20 nm
DI Water · Lens rinse
20 nm
Chemicals · Coating
70 ppt
AMC · Molecular
Product Portfolio
5 product families for optics & photonics cleanrooms
From DUV/EUV lithography optics to lens grinding, mirror coating, laser assembly and sensor packaging — Techmaster recommends the optimal configuration for Vietnam’s optics industry.
1
Lasair® Pro Family — Optics handhelds
Lightweight rechargeable handhelds — built for HVAC validation, ISO 14644 spot-checks, and certification of coating rooms, lens assembly and sensor packaging rooms.
Lasair Pro 350
Handheld · 50 LPM
50 LPM handheld — twice as fast as the 310 version. Ideal for auditing multiple lens-grinding rooms, coating chambers and laser rooms in a single shift.
Lasair Pro 5100
Handheld · 100 LPM
100 LPM flow — classify an entire optics plant in one shift. Built for large-scale optics plants, sensor packaging and fiber optic production.
2
Lasair® III Family — Trolley premium 0.1 µm
Fixed or trolley, sensitivity from 0.1 µm — required for DUV/EUV lithography optics, telescope mirrors, precision lenses and critical laser sources.
Lasair III 110
0.1 µm · ISO 1-3
The highest 0.1 µm-sensitivity particle counter — the standard for DUV/EUV lithography lenses, mirror sub-aperture polishing and critical sensors. Meets laser damage threshold requirements.
Lasair III 310B
0.3 µm · 6 channels · ISO 4-5
6 measurement channels (0.3, 0.5, 1.0, 5.0, 10 µm) for lens coating, laser optics assembly and fiber alignment. Balances sensitivity and cost for 90% of photonics applications.
Lasair III 350L
50 LPM flow · Large rooms
50 LPM flow (vs the standard 28.3 LPM) — cuts sampling time by 40% for large-volume optics cleanrooms, sampling 20+ locations per ISO 14644-1.
3
IsoAir® Pro Family — Fixed remote 24/7
Integrates with FacilityPro FMS with continuous data streaming — 24/7 monitoring of lens coating chambers, laser source rooms and sensor packaging, with instant alarms.
IsoAir Pro-E
Ethernet TCP/IP connectivity
Fixed counter with Ethernet connectivity for optics plants with existing cabling. Integrates with FMS via TCP/IP, OPC UA, BACnet for lithography lines and critical optics rooms.
IsoAir Pro-Plus
Wireless · Flexible deployment
Wireless for photonics cleanrooms — no cabling through vibration-sensitive areas required, flexible deployment for laser rooms, AES-encrypted 2.4 GHz. Saves 70% of cabling cost.
IsoAir Pro
Economical version
Entry-level option for optics R&D, prototype lens and optics lab projects on tighter budgets. Still delivers PMS reliability at an optimized investment cost.
4
Compact & CPC — NanoAir 10 + HandiLaz Mini II
An ultra-high-sensitivity 10 nm CPC for EUV photonics R&D, and the lightest handheld for fast audits in fiber optics and sensor module assembly.
NanoAir™ 10
10-nanometer-sensitivity CPC
10 nm-sensitivity particle counter for EUV lithography optics R&D, advanced laser sources and ultra-high-reflectivity mirror coating. The only one on the market — the standard for next-gen photonics.
HandiLaz® Mini II
Compact handheld · <1 kg
The lightest handheld at an economical price for fast audits of fiber optic assembly, sensor modules and R&D laser labs. Under 1 kg, 8-hour battery, XML/PDF report output.
Airnet II 4-channel
4 size channels · Network
4-size-channel networked particle sensor — deploy facility-wide for display panels, fiber optic factories and lens-grinding workshops. Lowest cost per measurement channel.
5
Liquid & AMC — Chem 20 + AirSentry · Optics critical
Particle measurement in DI water for lens rinsing, photoresist chemicals and coating solutions, plus AMC monitoring of ammonia/sulfate that causes laser damage and haze on optics.
Chem 20™
Chemical · 20 nm
20 nm particle counter in chemical liquids — the standard for photonics photoresist, optical coating solutions and sensor wet chemistry. Detects submicron contamination before it causes defects.
AirSentry® II AMC
Molecular · Optics critical
AMC (Airborne Molecular Contamination) monitoring for DUV/EUV lithography lenses, mirror haze prevention and laser damage threshold — catches ammonia, acid and sulfate at ppt level.
Ultra DI Family
UPW · Lens cleaning
UPW ultrapure-water particle counting for lens cleaning, mirror rinse and sensor surface preparation. The same technology used for 7nm semiconductor UPW systems.
Guide by ISO Class
How to choose a particle counter by optics cleanroom class
Each ISO 14644 class has its own particle limits — short wavelengths and high laser power demand the most critical cleanrooms, so choose the right counter up front to prevent laser damage and haze.
ISO 1-3 · Class 10
DUV/EUV Lithography · Laser Source
DUV/EUV lenses, EUV mirror coating, high-power laser cavities. Requires 0.1 µm detection and a 10 nm CPC. The most critical cleanroom.
ISO 4-5
Lens Assembly · Optical Coating
Lens grinding, mirror polishing, optical coating chambers, sensor wafer bonding. Balances 0.3 µm sensitivity and cost.
ISO 6-8
Fiber Optic · Display Assembly
Fiber optic alignment, display panel assembly, camera module packaging. Lower requirements — prioritizes economy and sensor density.
Optics software & FMS
FacilityPro — data integration & ISO 14644
PMS FMS systems monitor the entire optics plant — from lens grinding to laser packaging, with data-integrity audit trail, real-time alarms and automated reporting for ISO 14644, ISO 21501-4 and OEM customer requirements.
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Real-time monitoring lens coatingContinuously monitors particles, AMC and RH in the coating chamber — warning before haze or laser damage to optics occurs.
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AMC monitoring cho DUV/EUVDetects ammonia, acid and sulfate at ppt level — protecting DUV/EUV optics, critical sensors and laser sources from haze and damage.
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Facility-wide multi-sensor integrationMonitor 1,000+ sampling points, OPC UA, BACnet, Modbus, MQTT — integrates with the BMS and SCADA of display, fiber optic and sensor plants.
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Photonics standards complianceISO 14644-1/2, ISO 21501-4, ISO/IEC 17025, MIL-PRF-13830 (optics), OEM customer standards (Apple, Samsung).
Configuration consulting for your optics project
Techmaster Vietnam engineers provide free configuration consulting, on-site demos, and turnkey FMS proposals for lens grinding, mirror coating, laser source, sensor packaging, fiber optic and display panel cleanrooms.
