Keysight 4881HV High Voltage Wafer Test System

Keysight 4881HV – High Voltage Wafer Test System up to 3 kV

The Keysight 4881HV is an advanced wafer test system designed to perform both high-voltage (HV) and low-voltage (LV) parametric measurements in a single pass.
This system provides exceptional accuracy and flexibility for semiconductor manufacturers requiring reliable and repeatable electrical characterization up to 3 kV.

Key Features

• One-pass HV and LV parametric testing up to 3 kV

• HV switching matrix configurable with up to 29 output pins

• High precision current-voltage measurements with sub-picoampere resolution

• High-voltage capacitance measurement with up to 1 kV DC bias

• Supports 200 mm and 300 mm wafer probers and factory automation

• Complies with SEMI S2 and factory safety standards

Applications

The Keysight 4881HV system is engineered for advanced parametric testing of power and high-voltage semiconductor devices, making it the ideal solution for:

• Power semiconductor characterization for SiC and GaN devices

• Reliability and qualification testing in R&D and manufacturing environments

• Process monitoring and inline test in wafer fabrication lines

• Failure analysis and yield improvement through precise parametric measurement

• Compliance verification with factory and safety regulations

By combining HV and LV capabilities within one integrated platform, the 4881HV enables engineers and researchers to streamline complex test procedures and accelerate time-to-results.

Benefits

• Perform HV and LV tests in a single measurement cycle

• Ensure accuracy, consistency, and long-term reliability

• Simplify integration into automated test systems

• Maintain compliance with international manufacturing standards

Contact Techmaster – Authorized Keysight Distributor in Vietnam for technical consultation and product demonstration.

Note:

The Keysight 4881HV High Voltage Wafer Test System carries the official product model NX4881A. However, the 4881HV is not a standalone instrument. It is a comprehensive parametric test system composed of multiple modules and components that work together to deliver accurate, automated high-voltage and low-voltage measurements. The main subsystems include:

• High-Voltage Switching Matrix (HV-SWM):

This is the core component that enables flexible switching between high-voltage and low-voltage measurements on up to 29 pins, with output capability of up to 3 kV on any channel.

• High-Voltage Source Measure Units (HVSMUs):

Provide both sourcing and measurement for high-voltage and current parameters. The system supports up to two HVSMUs, each capable of up to 3 kV, allowing accurate characterization of high-voltage devices.

• Low-Voltage Source Measure Units (LVSMUs):

Deliver precise voltage and current sourcing and measurement for low-voltage parameters, with current resolution down to sub-picoampere levels. The system supports up to eight LVSMUs, each providing up to 200 V.

• Additional Measurement Resources:

Include a Capacitance Measurement Unit (CMU), Digital Voltmeter (DVM), Pulse Generator (PG), and Signal Parameter Analyzer (SPA) to perform a wide range of measurements — DC, C-V, pulse, and frequency domain analysis.

• Software Integration:

The system operates using Keysight SPECS and SPECS-FA (Factory Automation) software, which provide comprehensive control, automation, and data management for all test processes.

In summary, while the official model designation is NX4881A, the performance and capability of the Keysight 4881HV system are defined by its modular architecture — integrating specialized measurement and switching units developed by Keysight.