Liquid Particle Counter: UltraChem® 100

Sensitivity range: 100 – 500 nm

UltraChem® 100 Liquid Particle Counter

The UltraChem® 100 Liquid Particle Counter gives you reliable contamination monitoring with the ability to detect the smallest particle possible. If your application requires measuring small particles in chemicals with high molecular scatter, the UltraChem Liquid Particle Counter is the best tool for the job. NanoVision Technology eliminates the competition between the light scattered by fluid molecules and that from the particles. This makes 40 nm sizing possible for the first time. Background and false counts are a thing of the past. The NanoVision Technology breakthrough ensures only information that matches a particle fingerprint
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is counted. This results in data you can act on with confidence. The UltraChem Liquid Particle Counter achieves this sensitivity in chemicals using a low-cost laser diode. The proven long life of the diode enables a three-year warranty for maximum confidence in your particle counter. Get the performance you demand from a particle counter you can trust.
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UltraChem® 100 Liquid Particle Counter
PMS UltraChem 100 Liquid Particle Counter
UltraChem® 100 Liquid Particle Counter


  • Compatible with a wide-range of chemicals
  • 100nm sensitivity
  • Chemicals include: PGMEA, photoresist solvents, hydrogen fluoride (HF) and sulfuric acid
  • 3-year warranty
  • Solid state laser diode
  • Simple design
  • Online or batch sampling capabilities
  • Multiple communication protocols


  • Large sample volume for improved data quality
  • Adaptive technology makes the instrument immune to most optical contamination See what your particle counter sees
  • Measures small particles in a wide range of chemicals, including high molecular scattering fluids
  • Small footprint allows placement in various locations
  • Quick diagnostics and random distribution alerts you to a real particle event


  • DI water monitoring
  • Chemical distribution monitoring
  • Chemical quality assurance
  • Immersion lithography

Supporting Materials

Application Notes & Brochures


Nanovision Technology Enables High Molecule Scatter >


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Available Accessories

Facility Net

Facility Net

Facility Net Software provides a solution for comprehensive environmental monitoring, including a real-time and historical data display. Compatible with Particle Measuring Systems particle counters and molecular contamination monitors, as well as various third-party products.

Liquid Installation Kit

Liquid Installation Kit

For use with online  applications, the Liquid Installation Kit includes: a Flaretek® flaring tool, five caps, 25 ft of 1/4 in Perfluoroalkoxy alkanes (PFA) tubing and male connectors.

The UltraChem® 40 Liquid Particle Counter gives you reliable contamination monitoring with the ability to detect particles as small as 40 nm in chemicals with high molecular scatter.

World’s first 20 nm chemical particle counter, detects larger concentrations of particles with better statistics than competitive products.