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PMS UltraChem 100 Liquid Particle Counter

 

Features

  • Compatible with a wide-range of chemicals
  • 100nm sensitivity
  • Chemicals include: PGMEA, photoresist solvents, hydrogen fluoride (HF) and sulfuric acid
  • 3-year warranty
  • Solid state laser diode
  • Simple design
  • Online or batch sampling capabilities
  • Multiple communication protocols
UltraChem 100 Spec

Introduction Liquid Particle Counter: PMS UltraChem 100

Sensitivity range: 100 – 500 nm

The UltraChem® 100 Liquid Particle Counter gives you reliable contamination monitoring with the ability to detect the smallest particle possible. If your application requires measuring small particles in chemicals with high molecular scatter, the UltraChem Liquid Particle Counter is the best tool for the job. NanoVision Technology eliminates the competition between the light scattered by fluid molecules and that from the particles. This makes 40 nm sizing possible for the first time. Background and false counts are a thing of the past. The NanoVision Technology breakthrough ensures only information that matches a particle fingerprint is counted. This results in data you can act on with confidence. The UltraChem Liquid Particle Counter achieves this sensitivity in chemicals using a low-cost laser diode. The proven long life of the diode enables a three-year warranty for maximum confidence in your particle counter. Get the performance you demand from a particle counter you can trust.

Features Liquid Particle Counter: PMS UltraChem 100

  • Compatible with a wide-range of chemicals
  • 100nm sensitivity
  • Chemicals include: PGMEA, photoresist solvents, hydrogen fluoride (HF) and sulfuric acid
  • 3-year warranty
  • Solid state laser diode
  • Simple design
  • Online or batch sampling capabilities
  • Multiple communication protocols

Benefits

  • Large sample volume for improved data quality
  • Adaptive technology makes the instrument immune to most optical contamination See what your particle counter sees
  • Measures small particles in a wide range of chemicals, including high molecular scattering fluids
  • Small footprint allows placement in various locations
  • Quick diagnostics and random distribution alerts you to a real particle event

Applications

  • DI water monitoring
  • Chemical distribution monitoring
  • Chemical quality assurance
  • Immersion lithography

Specifications

Size range 100 – 500 nm
Size channels 100, 200, 300, 500 nm
Flow rate 20 ml/min
Sample volume 6 ml/min nominal
Maximum concentration + 3,000 particles/ml, Monitor mode

+ 9,000 particles/ml, Spectrometer mode

+ 15,000 particles /ml, High-Scatter mode

Sample temperature 50 – 302 °F (10 – 150 °C)
Zero coun <20 counts/l
Maximum pressure 100 psi
Wetted surface materials Sapphire, Teflon®, KEL-F®
Dimensions (d, w, h) 17.5 x 13.75 x 9.1 in (44 x 35 x 23 cm)
Weight 35 lb (16 kg)
Power 100 – 240 VAC 1.25 Amp
Communications Ethernet (PMS protocol) 4-20 mA; RS-232 (for set up only)
Environment Temperature 50 – 95 °F (10 – 35 °C);
Humidity Non-condensing

Products of Particle Measuring Systems.

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