Maintenance Solutions for Semiconductor Industry

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Although invisible, compressed air/gas leaks can affect product quality, production process and cause safety issues
fluke breakthrough acoustic imaging

Leverage on Fluke’s breakthrough acoustic imaging technology to quickly & accurately pinpoint compressed air, vacuum, gas or steam leaks

  • Detect leaks up to frequency range of 52/100kHz
  • Perform scanning in your facility with tool detection range up to 70/120m
  • Get to capture exact leak location in both picture/video form
  • Save up to 75% of your inspection time
Identify mechanical faults, such as bearing damages or wastes, on rotating machines easily
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Get immediate answers to mechanical issues with Fluke 810 Vibration Tester

  • Tri-axial accelerometer sensors reduces 2/3 of the measurement time than using single axis sensor
  • Detailed diagnostic reports and spectral diagrams help confirm data quality, and narrow down the root cause of failures
  • Repair recommendations advise technicians on corrective action
  • Fault severity scale with four severity levels helps you prioritize maintenance work
Whether you’re calibrating instruments, troubleshooting a problem, or running routine maintenance
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Save significant time from making multiple routine trips

  • Do more for less by covering various tasks in pressure, temperature, electrical loop etc
  • Accurately identify errors and correct it with HART protocol
  • Integrated workflow for a complete field calibration process that automates and documents the test results
Be 5 times faster in finding hidden faults within process control and automation line that can impact product process and quality
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Troubleshooting can easily take up 80% of a technician’s time. Overcome this challenge without the need to stop operation

  • Measure 4-20 mA live control signal without breaking a loop
  • Get all the instrumentation troubleshooting and verification needs in just one tool
  • Resolve signal issues for PLC and control system analog I/O


Perform regular inspections on your HVAC equipment (steam trap, air compressor etc) as well as electrical/mechanical to detect any thermal abnormalities ​

Early detection of system issues and inefficiencies can be easily done with thermal solution

  • Non-contact measurement, with little to no interruption to operations
  • Inspect pipeline blockage, building diagnostic issues, conveyors, bearings etc
  • Improve energy and operational efficiency
  • Reduce costly downtime and equipment damage
UPS backup battery is critical in ensuring your production facility is up and running under unforeseen circumstances such as power cut​
UPS backup battery

Reduced testing complexity, a simplified workflow and an intuitive user interface provide a new level of ease-of-use in battery testing

  • Quickly and easily define upper and lower measurement thresholds or tolerance ranges​
  • Key measurements – Internal battery resistance, dc and ac voltage, dc and ac current, ripple voltage, frequency and temperature​
  • Automatic or manual sequence testing of battery strings with automatic measurement storage
Eliminate the complexities of power quality logging, troubleshooting, and analysis while in accordance with the SEMI-F47 standard​

With the 1770 Series you can be confident that you’ll capture the event data you need to make better maintenance decisions no matter the task

  • Always capture all V/A/W measurements, dips and swells, transcients, harmonics
  • Easier UI with connection verification via front LED’s and UI
  • At-a-glance power quality health for faster troubleshooting​


Proper performing ventilation system is instrumental in managing the building envelope and to prevent impact to production area

Contaminants control via pressure differential between clean room and external environment

  • Diagnosing ventilation issues down to 0.001 in H2O resolution level
  • Ensure proper air pressure, air velocity, and cfm air flows
  • Perform duct traversals for HVAC maintenance
Assess air quality more easily and accurately, review and analyze data on the go
fluke conducting airbone

Conducting airborne particle control

  • Verify industrial cleanrooms by capturing airborne particle concentrations
  • Measure filter efficiency
  • Load studies for production line expansion
2 important factors in maintaining optimal comfort level and air quality – temperature and humidity
fluke HVAC

Quickly and easily obtain accurate readings in your facility/HVAC areas

  • Choose between degree Celsius and Fahrenheit reading
  • Measures dew point and wet bulb temperatures
  • Temperature range from -20 to 60degC

Find out how to integrate Fluke tools into your routine maintenance

With a 24/7 production schedule, no modern day fabrication plant can afford downtime. Fluke toolbelt solutions help in optimizing your maintenance process to increase productivity and output

Free learning resources: video, catalog and brochure


Free learning resources: video, catalog and brochure