Leading-edge microelectronic processes require very clean process chemicals that are highly filtered and regulated to a particle size of 20 nm or below. With 20 nm particle sensitivity, the Chem 20 Chemical Particle Counter from Particle Measuring Systems (PMS)is the world’s most sensitive particle sensor for high purity process chemicals and latest addition to our full line of liquid particle counters.
Extensive data on chemical distribution and packaging systems proves that the Chem 20 chemical particle counter, with 20 nm sensitivity, detects
larger concentrations of particles with better statistics than competitive products. The Chem 20 Chemical Particle Counter is a valuable tool that enables facility and process engineers to quickly detect and characterize chemical particle sources before they impact process and device performance.
The Chem 20 is one of Particle Measuring Systems’ “Industry Leading Sensitivity” products. This means that there are no products on the market that are more sensitive than these and only PMS offers a line of products covering this many elements of production monitoring. PMS currently leads the market in monitoring performance, sensitivity and reliability in the Ultrapure Water, Chemical and Airborne Molecular Contamination Monitoring fields. PMS’ superior knowledge, technology and service provides High Tech and Chemical manufacturing companies the most advanced tools to make accurate data-driven decisions, improving both performance and yield.
Learn about our full line of particle counters.
20 nm Chemical Batch Sampling Solution with the SLS-20 Syringe Sampler >
Facility Net Software provides a solution for comprehensive environmental monitoring, including a real-time and historical data display. Compatible with Particle Measuring Systems particle counters and molecular contamination monitors, as well as various third-party products.
For use with online applications, the Liquid Installation Kit includes: a Flaretek® flaring tool, five caps, 25 ft of 1/4 in Perfluoroalkoxy alkanes (PFA) tubing and male connectors.
A welded PFA device that allows entrained bubbles in an ultrapure water (UPW) or process chemical sample to separate from the sample stream through buoyancy, prior to the sample entering the liquid particle counter.
Houses the chemical particle sensor, detects chemical leaks with an external alarm, and provides secondary containment when a leak occurs. In the event of a chemical leak within the chemical particle counter or sample connections, the system will automatically detect the leak, shut off inlet and outlet sample valves, turn off power to the particle sensor, and provide an external alarm contact.