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<\/a><\/p>\nThe NanoAir\u2122 10 Condensation Particle Counter (CPC) is a revolutionary new product from\u00a0Particle Measuring Systems\u00a0(PMS). It provides the sensitivity of a CPC with the ease of use and functionality of a traditional cleanroom particle counter. Designed to monitor ultra-clean environments, it delivers 10 nm detection sensitivity at a sample flow rate of 2.8 L\/min (0.1 CFM).<\/p>\n
The NanoAir 10\u2019s size is 83% smaller than competitive products making it practical to use anywhere in ultra-clean environments, including inside<\/em>\u00a0semiconductor process tools and equipment front-end modules (EFEM). The innovative patent-pending working fluid handling system design is robust and efficient, enabling 24\/7, 365 days\u00a0continuous operation without the need for maintenance or user intervention\u00a0of any kind between the annually required working fluid refill and calibration. Thereby, reducing sampling and data collection interruptions and tool downtime.<\/p>\n A 10-port manifold companion product (ParticleSeeker\u2122) supports applications that require multiple sample locations to bemonitored in sequential or programmed sequences.<\/p>\n Additionally, the NanoAir is high-pressure gas compatible with the\u00a0HPD-III\u00a0from PMS, and data can be viewed, analyzed and reported using PMS\u00a0Facility Net facility monitoring software\u00a0or transmitted directly to third-party SCADA systems or process tool inputs.<\/p>\n<\/div>\n Nano Air 10 + ParticleSeeker\u2122<\/sup>\u00a0(10-port sampler):<\/strong><\/p>\n Nano Air 10 + HPD\u2122<\/sup>\u00a0III\u00a0(for high-pressure inert gas monitoring):<\/strong><\/p>\n Size range<\/p>\n<\/td>\n 10 nm (minimal detectable size @ D50)<\/p>\n<\/td>\n<\/tr>\n Aerosol flow rate<\/p>\n<\/td>\n 2.8 LPM (0.1 CFM) \u00b1 5%<\/p>\n<\/td>\n<\/tr>\n Sampling period<\/p>\n<\/td>\n 0.2 to 3600 seconds, user-selectable<\/p>\n<\/td>\n<\/tr>\n Max. particle concentration<\/p>\n<\/td>\n 200,000 #\/ft3 <\/sup><\/span>@ 10% coincidence loss<\/p>\n<\/td>\n<\/tr>\n Zero count<\/p>\n<\/td>\n < 1.5 #\/m3, No false count subtraction<\/p>\n<\/td>\n<\/tr>\n Volumetric sample %<\/p>\n<\/td>\n 100% – no sheath flow<\/p>\n<\/td>\n<\/tr>\n Counting efficiency<\/p>\n<\/td>\n 10 nm = 50% \u00b1 20%, 15 nm = 100% \u00b1 10%<\/p>\n<\/td>\n<\/tr>\n Calibration<\/p>\n<\/td>\n yearly<\/p>\n<\/td>\n<\/tr>\n Instrument warm-up time<\/p>\n<\/td>\n 20 minutes, nominal<\/p>\n<\/td>\n<\/tr>\n Working fluid<\/p>\n<\/td>\n Organic, non-toxic, non-flammable<\/p>\n 240 ml total working fluid volume<\/p>\n<\/td>\n<\/tr>\n Working fluid consumption and instrument volume<\/p>\n<\/td>\n 12 months between refills 240 ml total working fluid volume<\/p>\n<\/td>\n<\/tr>\n Sample tubing<\/p>\n<\/td>\n Static Control Polyurethane Tubing 6 mm OD, 4 mm ID (PMS P\/N: 1000026711)<\/p>\n<\/td>\n<\/tr>\n Sample tubing length<\/p>\n<\/td>\n \u2264 10 m (33 feet)<\/p>\n<\/td>\n<\/tr>\n Laser classification<\/p>\n<\/td>\n Class 1, complies with US 21 CFR 1040.10 and EN60825-1. Internally an enclosed Class 3B laser is used per EN60825-1.<\/p>\n<\/td>\n<\/tr>\n Data storage<\/p>\n<\/td>\n >10,000 samples<\/p>\n<\/td>\n<\/tr>\n Dimensions (l,w,h)<\/p>\n<\/td>\n 8.0 x 6.0 x 6.5 in (20.3x 15.2 x 16.5 cm)<\/p>\n<\/td>\n<\/tr>\n Weight<\/p>\n<\/td>\n 6.1 lb (2.8 kg)<\/p>\n<\/td>\n<\/tr>\n LED Indication<\/p>\n<\/td>\n Power, flow error, laser error, activity, working fluid level<\/p>\n<\/td>\n<\/tr>\n Power<\/p>\n<\/td>\n External AC to DC Power Supply:<\/p>\n Input: 100 \u2013 240 VAC, 50\/60 Hz, 1.5 AOutput: 24 VDC 5.0 AAC input voltage fluctuation shall not exceed \u00b1 10%<\/p>\n<\/td>\n<\/tr>\n Communications<\/p>\n<\/td>\n \u2022 Ethernet connectivity (PMS Proprietary)\u2022 Modbus via TCP\/IP\u2022 Serial USB \u2022 4-20mA (4 analog input ports, 2 analog output ports)\u2022 Dry contact relays (4)<\/p>\n<\/td>\n<\/tr>\n Operating temperature range<\/p>\n<\/td>\n 50 \u2013 90 \u00b0F (10 \u2013 32 \u00b0C)<\/p>\n<\/td>\n<\/tr>\n Humidity range<\/p>\n<\/td>\n 0 \u2013 60% RH, non-condensing<\/p>\n<\/td>\n<\/tr>\n Operating pressure<\/p>\n<\/td>\n 1 atm (ambient)<\/p>\n<\/td>\n<\/tr>\n Vacuum source<\/p>\n<\/td>\n External, \u2265 12 inHg required<\/p>\n<\/td>\n<\/tr>\n Power<\/p>\n<\/td>\n 24 VDC, 5 Amp<\/p>\n<\/td>\n<\/tr>\n Installation requirements (with external AC to DC power supply)<\/p>\n<\/td>\n \u2022 Indoor use only \u2022 Pollution degree 2\u2022 Over voltage category I\u2022 Ordinary protection (not protected against harmful ingress of moisture)\u2022 External AC to DC Power Supply:<\/p>\n \u2022 Over voltage category II<\/p>\n \u2022 Class I Equipment (Electrical earth ground from the mains power source to the product<\/p>\n input is required for safety.)<\/p>\n<\/td>\n<\/tr>\n Status Indicators<\/p>\n<\/td>\n \u2022 Power button LED ring (4-color, operational states) \u2022 Front edge and corner LED (4-color, operational states)\u2022 Working fluid level indicator (8 level real-time detection)<\/p>\n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n Products of Particle Measuring Systems.<\/strong><\/a><\/p>\n<\/div>\n<\/div>\n<\/a><\/h2>\nFeatures PMS NanoAir 10 Aerosol Particle Counter<\/h2>\n
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Benefits PMS Nano Air 10<\/h2>\n
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Applications PMS Nano Air 10<\/h2>\n<\/div>\n
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Specifications PMS Nano Air 10<\/h2>\n
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