{"id":33895,"date":"2022-07-13T16:58:02","date_gmt":"2022-07-13T09:58:02","guid":{"rendered":"https:\/\/techmaster.com.vn\/?page_id=33895"},"modified":"2023-06-26T16:18:03","modified_gmt":"2023-06-26T09:18:03","slug":"particle-monitoring-strategies-in-upw-300-mm-fabs","status":"publish","type":"page","link":"https:\/\/techmaster.com.vn\/en\/particle-monitoring-strategies-in-upw-300-mm-fabs\/","title":{"rendered":"Particle Monitoring Strategies in UPW: 300 mm Fabs"},"content":{"rendered":"\n\t<section class=\"section\" id=\"section_1801653806\">\n\t\t<div class=\"bg section-bg fill bg-fill  \" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n\n<div class=\"row\"  id=\"row-1383052906\">\n\n\n\t<div id=\"col-1938764037\" class=\"col small-12 large-12\"  >\n\t\t\t\t<div class=\"col-inner\"  >\n\t\t\t\n\t\t\t\n\n\t<div id=\"text-1530064545\" class=\"text\">\n\t\t\n\n<h1>Particle Monitoring Strategies in UPW: 300 mm Fabs<\/h1>\n\t\t\n<style>\n#text-1530064545 {\n  font-size: 1.5rem;\n  line-height: 1.2;\n  color: rgb(255,255,255);\n}\n#text-1530064545 > * {\n  color: rgb(255,255,255);\n}\n<\/style>\n\t<\/div>\n\t\n\n\t\t<\/div>\n\t\t\t\t\n<style>\n#col-1938764037 > .col-inner {\n  padding: 0px 0px 0px 0;\n  margin: 0px 0px -55px 0px;\n}\n<\/style>\n\t<\/div>\n\n\t\n\n\n<style>\n#row-1383052906 > .col > .col-inner {\n  padding: 0px 0px 1px 0px;\n}\n<\/style>\n<\/div>\n\n\t\t<\/div>\n\n\t\t\n<style>\n#section_1801653806 {\n  padding-top: 30px;\n  padding-bottom: 30px;\n}\n#section_1801653806 .section-bg.bg-loaded {\n  background-image: url(https:\/\/techmaster.com.vn\/wp-content\/uploads\/2023\/06\/microbial-product-banners.jpg);\n}\n#section_1801653806 .ux-shape-divider--top svg {\n  height: 150px;\n  --divider-top-width: 100%;\n}\n#section_1801653806 .ux-shape-divider--bottom svg {\n  height: 150px;\n  --divider-width: 100%;\n}\n<\/style>\n\t<\/section>\n\t\n\t<section class=\"section\" id=\"section_703097913\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n\n<div class=\"row\"  id=\"row-1075064913\">\n\n\n\t<div id=\"col-1558762175\" class=\"col medium-7 small-12 large-7\"  >\n\t\t\t\t<div class=\"col-inner\"  >\n\t\t\t\n\t\t\t\n\n<h2><span data-text-color=\"alert\">Particle Monitoring Strategies in UPW: 300 mm Fabs<\/span><\/h2>\n<p>Process failures caused by particles in Ultra Pure Water (UPW) are relatively infrequent events, but with the move to 300 mm wafers and 90 nm line widths, they can have significant financial impact. Most particle monitoring strategies in the past focused on the use of the mobile and inline high sensitivity 0.05 micron particle counters. This paper examines the opportunities to improve performance, track data trends, and reduce cost by using a combination of both high sensitivity particle counters (to 0.03 microns) and less expensive lower sensitivity (0.1 microns) counters with very high sample volumes. The scope of this paper details the impact of size sensitivity, sample volume, and zero count level on particle counter performance. Practical monitoring considerations and particle distribution differences between poorly filtered and highly filtered systems are discussed.<\/p>\n<p>Interested in learning more? <strong>Complete the form <span style=\"text-decoration: underline;\"><em><a href=\"https:\/\/techmaster.com.vn\/en\/contact\/#request\">here<\/a><\/em><\/span> to receive expert consultation<\/strong><\/p>\n\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\n\t\n\n\t<div id=\"col-1636305249\" class=\"col medium-5 small-12 large-5\"  >\n\t\t\t\t<div class=\"col-inner\"  >\n\t\t\t\n\t\t\t\n\n\t<div class=\"img has-hover x md-x lg-x y md-y lg-y\" id=\"image_1312111679\">\n\t\t\t\t\t\t\t\t<div class=\"img-inner dark\" >\n\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"482\" height=\"264\" src=\"https:\/\/techmaster.com.vn\/wp-content\/uploads\/2023\/06\/fab-particle-counting.png\" class=\"attachment-large size-large\" alt=\"\" \/>\t\t\t\t\t\t\n\t\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t\n<style>\n#image_1312111679 {\n  width: 100%;\n}\n<\/style>\n\t<\/div>\n\t\n\n\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\n\t\n\n<\/div>\n\n\t\t<\/div>\n\n\t\t\n<style>\n#section_703097913 {\n  padding-top: 30px;\n  padding-bottom: 30px;\n  background-color: rgb(255,255,255);\n}\n#section_703097913 .ux-shape-divider--top svg {\n  height: 150px;\n  --divider-top-width: 100%;\n}\n#section_703097913 .ux-shape-divider--bottom svg {\n  height: 150px;\n  --divider-width: 100%;\n}\n<\/style>\n\t<\/section>\n\t\n\n","protected":false},"excerpt":{"rendered":"","protected":false},"author":11,"featured_media":34747,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"page-blank.php","meta":{"footnotes":""},"class_list":["post-33895","page","type-page","status-publish","has-post-thumbnail","hentry"],"yoast_head":"<!-- This site is optimized with the Yoast SEO Premium plugin v26.8 (Yoast SEO v26.8) - https:\/\/yoast.com\/product\/yoast-seo-premium-wordpress\/ -->\n<title>Particle Monitoring Strategies in UPW: 300 mm Fabs - Techmaster Electronics JSC<\/title>\n<meta name=\"description\" content=\"Process failures caused by particles in Ultra Pure Water (UPW) are relatively infrequent events, but with the move to 300 mm wafers and 90 nm line widths\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/techmaster.com.vn\/en\/particle-monitoring-strategies-in-upw-300-mm-fabs\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Particle Monitoring Strategies in UPW: 300 mm Fabs\" \/>\n<meta property=\"og:description\" content=\"Process failures caused by particles in Ultra Pure Water (UPW) are relatively infrequent events, but with the move to 300 mm wafers and 90 nm line widths\" \/>\n<meta property=\"og:url\" content=\"https:\/\/techmaster.com.vn\/en\/particle-monitoring-strategies-in-upw-300-mm-fabs\/\" \/>\n<meta property=\"og:site_name\" content=\"Techmaster Electronics JSC\" \/>\n<meta property=\"article:publisher\" content=\"https:\/\/www.facebook.com\/techmaster.electronics.jsc\" \/>\n<meta property=\"article:modified_time\" content=\"2023-06-26T09:18:03+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/techmaster.com.vn\/wp-content\/uploads\/2022\/07\/Particle-Monitoring-Strategies-in-UPW-300-mm-Fabs-thumbnail.jpg\" \/>\n\t<meta property=\"og:image:width\" content=\"400\" \/>\n\t<meta property=\"og:image:height\" content=\"305\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/jpeg\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:site\" content=\"@techmastervn\" \/>\n<meta name=\"twitter:label1\" content=\"Est. reading time\" \/>\n\t<meta name=\"twitter:data1\" content=\"1 minute\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\/\/techmaster.com.vn\/en\/particle-monitoring-strategies-in-upw-300-mm-fabs\/\",\"url\":\"https:\/\/techmaster.com.vn\/en\/particle-monitoring-strategies-in-upw-300-mm-fabs\/\",\"name\":\"Particle Monitoring Strategies in UPW: 300 mm Fabs - Techmaster Electronics JSC\",\"isPartOf\":{\"@id\":\"https:\/\/techmaster.com.vn\/en\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\/\/techmaster.com.vn\/en\/particle-monitoring-strategies-in-upw-300-mm-fabs\/#primaryimage\"},\"image\":{\"@id\":\"https:\/\/techmaster.com.vn\/en\/particle-monitoring-strategies-in-upw-300-mm-fabs\/#primaryimage\"},\"thumbnailUrl\":\"https:\/\/techmaster.com.vn\/wp-content\/uploads\/2022\/07\/Particle-Monitoring-Strategies-in-UPW-300-mm-Fabs-thumbnail.jpg\",\"datePublished\":\"2022-07-13T09:58:02+00:00\",\"dateModified\":\"2023-06-26T09:18:03+00:00\",\"description\":\"Process failures caused by particles in Ultra Pure Water (UPW) are relatively infrequent events, but with the move to 300 mm wafers and 90 nm line widths\",\"breadcrumb\":{\"@id\":\"https:\/\/techmaster.com.vn\/en\/particle-monitoring-strategies-in-upw-300-mm-fabs\/#breadcrumb\"},\"inLanguage\":\"en-US\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\/\/techmaster.com.vn\/en\/particle-monitoring-strategies-in-upw-300-mm-fabs\/\"]}]},{\"@type\":\"ImageObject\",\"inLanguage\":\"en-US\",\"@id\":\"https:\/\/techmaster.com.vn\/en\/particle-monitoring-strategies-in-upw-300-mm-fabs\/#primaryimage\",\"url\":\"https:\/\/techmaster.com.vn\/wp-content\/uploads\/2022\/07\/Particle-Monitoring-Strategies-in-UPW-300-mm-Fabs-thumbnail.jpg\",\"contentUrl\":\"https:\/\/techmaster.com.vn\/wp-content\/uploads\/2022\/07\/Particle-Monitoring-Strategies-in-UPW-300-mm-Fabs-thumbnail.jpg\",\"width\":400,\"height\":305,\"caption\":\"Particle Monitoring Strategies in UPW: 300 mm Fabs\"},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/techmaster.com.vn\/en\/particle-monitoring-strategies-in-upw-300-mm-fabs\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Trang ch\u1ee7\",\"item\":\"https:\/\/techmaster.com.vn\/en\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"Particle Monitoring Strategies in UPW: 300 mm Fabs\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/techmaster.com.vn\/en\/#website\",\"url\":\"https:\/\/techmaster.com.vn\/en\/\",\"name\":\"Techmaster Electronics JSC\",\"description\":\"\",\"publisher\":{\"@id\":\"https:\/\/techmaster.com.vn\/en\/#organization\"},\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/techmaster.com.vn\/en\/?s={search_term_string}\"},\"query-input\":{\"@type\":\"PropertyValueSpecification\",\"valueRequired\":true,\"valueName\":\"search_term_string\"}}],\"inLanguage\":\"en-US\"},{\"@type\":[\"Organization\",\"Place\"],\"@id\":\"https:\/\/techmaster.com.vn\/en\/#organization\",\"name\":\"Techmaster Electronics JSC\",\"url\":\"https:\/\/techmaster.com.vn\/en\/\",\"logo\":{\"@id\":\"https:\/\/techmaster.com.vn\/en\/particle-monitoring-strategies-in-upw-300-mm-fabs\/#local-main-organization-logo\"},\"image\":{\"@id\":\"https:\/\/techmaster.com.vn\/en\/particle-monitoring-strategies-in-upw-300-mm-fabs\/#local-main-organization-logo\"},\"sameAs\":[\"https:\/\/www.facebook.com\/techmaster.electronics.jsc\",\"https:\/\/x.com\/techmastervn\",\"https:\/\/www.instagram.com\/techmastervietnam\",\"https:\/\/myspace.com\/techmastervietnam\",\"https:\/\/www.youtube.com\/c\/TechmasterElectronicsJSC\",\"https:\/\/www.pinterest.com\/techmasterelectronicsjsc\/\",\"https:\/\/vi.wikipedia.org\/wiki\/Th\u00e0nh_vi\u00ean:Techmastervietnam\",\"https:\/\/twitter.com\/techmastervn\",\"https:\/\/www.linkedin.com\/company\/techmaster-vietnam\/\"],\"telephone\":[],\"contactPoint\":{\"@type\":\"ContactPoint\",\"email\":\"marketing@techmaster.com.vn\"},\"openingHoursSpecification\":[{\"@type\":\"OpeningHoursSpecification\",\"dayOfWeek\":[\"Monday\",\"Tuesday\",\"Wednesday\",\"Thursday\",\"Friday\",\"Saturday\",\"Sunday\"],\"opens\":\"09:00\",\"closes\":\"17:00\"}],\"email\":\"marketing@techmaster.com.vn\",\"areaServed\":\"Vietnam\"},{\"@type\":\"ImageObject\",\"inLanguage\":\"en-US\",\"@id\":\"https:\/\/techmaster.com.vn\/en\/particle-monitoring-strategies-in-upw-300-mm-fabs\/#local-main-organization-logo\",\"url\":\"https:\/\/techmaster.com.vn\/wp-content\/uploads\/2021\/04\/techmaster-logo-homepage.png\",\"contentUrl\":\"https:\/\/techmaster.com.vn\/wp-content\/uploads\/2021\/04\/techmaster-logo-homepage.png\",\"width\":335,\"height\":62,\"caption\":\"Techmaster Electronics JSC\"}]}<\/script>\n<!-- \/ Yoast SEO Premium plugin. -->","yoast_head_json":{"title":"Particle Monitoring Strategies in UPW: 300 mm Fabs - Techmaster Electronics JSC","description":"Process failures caused by particles in Ultra Pure Water (UPW) are relatively infrequent events, but with the move to 300 mm wafers and 90 nm line widths","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/techmaster.com.vn\/en\/particle-monitoring-strategies-in-upw-300-mm-fabs\/","og_locale":"en_US","og_type":"article","og_title":"Particle Monitoring Strategies in UPW: 300 mm Fabs","og_description":"Process failures caused by particles in Ultra Pure Water (UPW) are relatively infrequent events, but with the move to 300 mm wafers and 90 nm line widths","og_url":"https:\/\/techmaster.com.vn\/en\/particle-monitoring-strategies-in-upw-300-mm-fabs\/","og_site_name":"Techmaster Electronics JSC","article_publisher":"https:\/\/www.facebook.com\/techmaster.electronics.jsc","article_modified_time":"2023-06-26T09:18:03+00:00","og_image":[{"width":400,"height":305,"url":"https:\/\/techmaster.com.vn\/wp-content\/uploads\/2022\/07\/Particle-Monitoring-Strategies-in-UPW-300-mm-Fabs-thumbnail.jpg","type":"image\/jpeg"}],"twitter_card":"summary_large_image","twitter_site":"@techmastervn","twitter_misc":{"Est. reading time":"1 minute"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"WebPage","@id":"https:\/\/techmaster.com.vn\/en\/particle-monitoring-strategies-in-upw-300-mm-fabs\/","url":"https:\/\/techmaster.com.vn\/en\/particle-monitoring-strategies-in-upw-300-mm-fabs\/","name":"Particle Monitoring Strategies in UPW: 300 mm Fabs - Techmaster Electronics JSC","isPartOf":{"@id":"https:\/\/techmaster.com.vn\/en\/#website"},"primaryImageOfPage":{"@id":"https:\/\/techmaster.com.vn\/en\/particle-monitoring-strategies-in-upw-300-mm-fabs\/#primaryimage"},"image":{"@id":"https:\/\/techmaster.com.vn\/en\/particle-monitoring-strategies-in-upw-300-mm-fabs\/#primaryimage"},"thumbnailUrl":"https:\/\/techmaster.com.vn\/wp-content\/uploads\/2022\/07\/Particle-Monitoring-Strategies-in-UPW-300-mm-Fabs-thumbnail.jpg","datePublished":"2022-07-13T09:58:02+00:00","dateModified":"2023-06-26T09:18:03+00:00","description":"Process failures caused by particles in Ultra Pure Water (UPW) are relatively infrequent events, but with the move to 300 mm wafers and 90 nm line widths","breadcrumb":{"@id":"https:\/\/techmaster.com.vn\/en\/particle-monitoring-strategies-in-upw-300-mm-fabs\/#breadcrumb"},"inLanguage":"en-US","potentialAction":[{"@type":"ReadAction","target":["https:\/\/techmaster.com.vn\/en\/particle-monitoring-strategies-in-upw-300-mm-fabs\/"]}]},{"@type":"ImageObject","inLanguage":"en-US","@id":"https:\/\/techmaster.com.vn\/en\/particle-monitoring-strategies-in-upw-300-mm-fabs\/#primaryimage","url":"https:\/\/techmaster.com.vn\/wp-content\/uploads\/2022\/07\/Particle-Monitoring-Strategies-in-UPW-300-mm-Fabs-thumbnail.jpg","contentUrl":"https:\/\/techmaster.com.vn\/wp-content\/uploads\/2022\/07\/Particle-Monitoring-Strategies-in-UPW-300-mm-Fabs-thumbnail.jpg","width":400,"height":305,"caption":"Particle Monitoring Strategies in UPW: 300 mm Fabs"},{"@type":"BreadcrumbList","@id":"https:\/\/techmaster.com.vn\/en\/particle-monitoring-strategies-in-upw-300-mm-fabs\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"Trang ch\u1ee7","item":"https:\/\/techmaster.com.vn\/en\/"},{"@type":"ListItem","position":2,"name":"Particle Monitoring Strategies in UPW: 300 mm Fabs"}]},{"@type":"WebSite","@id":"https:\/\/techmaster.com.vn\/en\/#website","url":"https:\/\/techmaster.com.vn\/en\/","name":"Techmaster Electronics JSC","description":"","publisher":{"@id":"https:\/\/techmaster.com.vn\/en\/#organization"},"potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/techmaster.com.vn\/en\/?s={search_term_string}"},"query-input":{"@type":"PropertyValueSpecification","valueRequired":true,"valueName":"search_term_string"}}],"inLanguage":"en-US"},{"@type":["Organization","Place"],"@id":"https:\/\/techmaster.com.vn\/en\/#organization","name":"Techmaster Electronics JSC","url":"https:\/\/techmaster.com.vn\/en\/","logo":{"@id":"https:\/\/techmaster.com.vn\/en\/particle-monitoring-strategies-in-upw-300-mm-fabs\/#local-main-organization-logo"},"image":{"@id":"https:\/\/techmaster.com.vn\/en\/particle-monitoring-strategies-in-upw-300-mm-fabs\/#local-main-organization-logo"},"sameAs":["https:\/\/www.facebook.com\/techmaster.electronics.jsc","https:\/\/x.com\/techmastervn","https:\/\/www.instagram.com\/techmastervietnam","https:\/\/myspace.com\/techmastervietnam","https:\/\/www.youtube.com\/c\/TechmasterElectronicsJSC","https:\/\/www.pinterest.com\/techmasterelectronicsjsc\/","https:\/\/vi.wikipedia.org\/wiki\/Th\u00e0nh_vi\u00ean:Techmastervietnam","https:\/\/twitter.com\/techmastervn","https:\/\/www.linkedin.com\/company\/techmaster-vietnam\/"],"telephone":[],"contactPoint":{"@type":"ContactPoint","email":"marketing@techmaster.com.vn"},"openingHoursSpecification":[{"@type":"OpeningHoursSpecification","dayOfWeek":["Monday","Tuesday","Wednesday","Thursday","Friday","Saturday","Sunday"],"opens":"09:00","closes":"17:00"}],"email":"marketing@techmaster.com.vn","areaServed":"Vietnam"},{"@type":"ImageObject","inLanguage":"en-US","@id":"https:\/\/techmaster.com.vn\/en\/particle-monitoring-strategies-in-upw-300-mm-fabs\/#local-main-organization-logo","url":"https:\/\/techmaster.com.vn\/wp-content\/uploads\/2021\/04\/techmaster-logo-homepage.png","contentUrl":"https:\/\/techmaster.com.vn\/wp-content\/uploads\/2021\/04\/techmaster-logo-homepage.png","width":335,"height":62,"caption":"Techmaster Electronics JSC"}]}},"_links":{"self":[{"href":"https:\/\/techmaster.com.vn\/en\/wp-json\/wp\/v2\/pages\/33895","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/techmaster.com.vn\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/techmaster.com.vn\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/techmaster.com.vn\/en\/wp-json\/wp\/v2\/users\/11"}],"replies":[{"embeddable":true,"href":"https:\/\/techmaster.com.vn\/en\/wp-json\/wp\/v2\/comments?post=33895"}],"version-history":[{"count":0,"href":"https:\/\/techmaster.com.vn\/en\/wp-json\/wp\/v2\/pages\/33895\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/techmaster.com.vn\/en\/wp-json\/wp\/v2\/media\/34747"}],"wp:attachment":[{"href":"https:\/\/techmaster.com.vn\/en\/wp-json\/wp\/v2\/media?parent=33895"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}