{"id":33846,"date":"2022-07-13T15:29:59","date_gmt":"2022-07-13T08:29:59","guid":{"rendered":"https:\/\/techmaster.com.vn\/?page_id=33846"},"modified":"2023-06-26T11:31:15","modified_gmt":"2023-06-26T04:31:15","slug":"monitoring-of-upw-systems-using-ultra-di-20","status":"publish","type":"page","link":"https:\/\/techmaster.com.vn\/en\/monitoring-of-upw-systems-using-ultra-di-20\/","title":{"rendered":"Monitoring of UPW Systems Using Ultra DI 20"},"content":{"rendered":"\n\t<section class=\"section\" id=\"section_1154331706\">\n\t\t<div class=\"bg section-bg fill bg-fill  \" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n\n<div class=\"row\" style=\"max-width:\" id=\"row-1890592427\">\n\n\n\t<div id=\"col-2397345\" class=\"col small-12 large-12\"  >\n\t\t\t\t<div class=\"col-inner\"  >\n\t\t\t\n\t\t\t\n\n\t<div id=\"text-3180437973\" class=\"text\">\n\t\t\n\n<h1 class=\"banner-title\">Monitoring of UPW Systems Using Ultra DI\u00ae 20<\/h1>\n\t\t\n<style>\n#text-3180437973 {\n  font-size: 1.5rem;\n  color: rgb(255,255,255);\n}\n#text-3180437973 > * {\n  color: rgb(255,255,255);\n}\n<\/style>\n\t<\/div>\n\t\n\n\t\t<\/div>\n\t\t\t\t\n<style>\n#col-2397345 > .col-inner {\n  padding: 0px 0px 0px 0;\n  margin: 0px 0px -55px 0px;\n}\n<\/style>\n\t<\/div>\n\n\t\n\n<\/div>\n\n\t\t<\/div>\n\n\t\t\n<style>\n#section_1154331706 {\n  padding-top: 30px;\n  padding-bottom: 30px;\n}\n#section_1154331706 .section-bg.bg-loaded {\n  background-image: url(https:\/\/techmaster.com.vn\/wp-content\/uploads\/2023\/06\/microbial-product-banners.jpg);\n}\n#section_1154331706 .ux-shape-divider--top svg {\n  height: 150px;\n  --divider-top-width: 100%;\n}\n#section_1154331706 .ux-shape-divider--bottom svg {\n  height: 150px;\n  --divider-width: 100%;\n}\n<\/style>\n\t<\/section>\n\t\n\t<section class=\"section\" id=\"section_1707326555\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n\n<div class=\"row\"  id=\"row-1381489741\">\n\n\n\t<div id=\"col-885398221\" class=\"col medium-9 small-12 large-9\"  >\n\t\t\t\t<div class=\"col-inner\"  >\n\t\t\t\n\t\t\t\n\n<h2><span data-text-color=\"alert\">Monitoring of UPW Systems Using Ultra DI 20<\/span><\/h2>\n<h2><span data-text-color=\"alert\">Abstract<\/span><\/h2>\n<p>Through continuous process and equipment advancements, semiconductor manufacturers are approaching 14 nm feature sizes and heading even smaller, while hard-disk drive fly heights are now less than 10 nm. This ever-reducing device feature size requires comparable cleanliness-level improvements in ultrapure water (UPW). UPW purity is especially important with its high use in direct contact with wafers as a final cleaning and rinsing agent in many production steps.\u00a0Leveraging recent advances in laser optics and detector technology, the <span style=\"text-decoration: underline; color: #962929;\"><em><a style=\"color: #962929; text-decoration: underline;\" href=\"https:\/\/techmaster.com.vn\/en\/20-nm-liquid-particle-counter-ultra-di-20-plus\/\">Ultra DI\u00ae 20<\/a><\/em><\/span> can effectively monitor UPW particle concentration \u226520 nm, or, in the case of metallic particles, \u22659 nm. Monitoring is continuous and occurs in real time to enable maximum process control. This industry-leading sizing sensitivity is provided in a system that correlates well with legacy 50 nm particle metrology for data continuity. The Particle Measuring Systems<sup>\u00ae<\/sup>\u00a0(PMS) <span style=\"text-decoration: underline; color: #962929;\"><em><a style=\"color: #962929; text-decoration: underline;\" href=\"https:\/\/techmaster.com.vn\/en\/20-nm-liquid-particle-counter-ultra-di-20-plus\/\">Ultra DI 20<\/a><\/em><\/span> was specifically developed to meet the challenges of microelectronics UPW cleanliness monitoring.<\/p>\n\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\n\t\n\n\t<div id=\"col-2110730643\" class=\"col medium-3 small-12 large-3\"  >\n\t\t\t\t<div class=\"col-inner\"  >\n\t\t\t\n\t\t\t\n\n\t<div class=\"img has-hover x md-x lg-x y md-y lg-y\" id=\"image_258241919\">\n\t\t\t\t\t\t\t\t<div class=\"img-inner dark\" >\n\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"320\" height=\"428\" src=\"https:\/\/techmaster.com.vn\/wp-content\/uploads\/2022\/07\/monitoring-of-upw-systems-using-ultra-di20.jpeg\" class=\"attachment-large size-large\" alt=\"Monitoring of UPW Systems Using Ultra DI 20\" \/>\t\t\t\t\t\t\n\t\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t\n<style>\n#image_258241919 {\n  width: 100%;\n}\n<\/style>\n\t<\/div>\n\t\n\n\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\n\t\n\n<\/div>\n<div class=\"row\"  id=\"row-616869846\">\n\n\n\t<div id=\"col-181053788\" class=\"col small-12 large-12\"  >\n\t\t\t\t<div class=\"col-inner\"  >\n\t\t\t\n\t\t\t\n\n<h2><span data-text-color=\"alert\">Overview of UPW system<\/span><\/h2>\n<p>UPW is treated through a multi-step process (<strong>Figure 1<\/strong>) to meet the high quality standards for leading semiconductor, hard-disk drive and MEMs manufacturing. Advancements in water treatment and filtration at critical UPW facilities provide water at cleanliness levels better than many existing metrology devices can accurately measure.\u00a0 In fact, most modern UPW systems are so clean that there are fewer than 100 particles\/Liter greater than 50 nm in size. At these low contamination levels, changes in particle concentration at 50 nm become nearly invisible as they approach detection limits of older instruments. This continuous UPW quality improvement requires a new monitoring solution that can detect significantly smaller particles at very low concentrations.<\/p>\n<p>Within many ultrapure water systems, particle concentration is measured only after the final filtration step. Particle levels need to be as low as possible at the point of use where the water contacts the wafer. It is recommended that the final particle monitoring be located as close to the UPW\u2019s point of use as possible to assure that it is capturing a true measurement of the wafer exposure.<\/p>\n\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\n\t\n\n\t<div id=\"col-989936237\" class=\"col small-12 large-12\"  >\n\t\t\t\t<div class=\"col-inner\"  >\n\t\t\t\n\t\t\t\n\n<h2><span data-text-color=\"alert\">Introduction to Ultra DI 20<\/span><\/h2>\n<p>The <span style=\"text-decoration: underline; color: #962929;\"><em><a style=\"color: #962929; text-decoration: underline;\" href=\"https:\/\/techmaster.com.vn\/en\/20-nm-liquid-particle-counter-ultra-di-20-plus\/\">Ultra DI 20<\/a><\/em><\/span> is the industry\u2019s first 20 nm (PSLs) and 9 nm (metals) sensitivity liquid particle counter. This new instrument is equipped with advanced laser and detector technologies in order to collect sufficient scattered light from these extremely small particles. The <span style=\"text-decoration: underline; color: #962929;\"><em><a style=\"color: #962929; text-decoration: underline;\" href=\"https:\/\/techmaster.com.vn\/en\/20-nm-liquid-particle-counter-ultra-di-20-plus\/\">Ultra DI 20<\/a><\/em><\/span> is designed to operate continuously, providing stable real-time data, with reduced water consumption so that it may be applied inside process equipment areas with restricted flow capacity. This is an ideal solution to enable continuous particle monitoring of a UPW system for modern semiconductor, hard-disk drive and MEMs manufacturing.<\/p>\n\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\n\t\n\n<\/div>\n\n\t\t<\/div>\n\n\t\t\n<style>\n#section_1707326555 {\n  padding-top: 30px;\n  padding-bottom: 30px;\n  background-color: rgb(255,255,255);\n}\n#section_1707326555 .ux-shape-divider--top svg {\n  height: 150px;\n  --divider-top-width: 100%;\n}\n#section_1707326555 .ux-shape-divider--bottom svg {\n  height: 150px;\n  --divider-width: 100%;\n}\n<\/style>\n\t<\/section>\n\t\n\n","protected":false},"excerpt":{"rendered":"","protected":false},"author":11,"featured_media":34736,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"page-blank.php","meta":{"footnotes":""},"class_list":["post-33846","page","type-page","status-publish","has-post-thumbnail","hentry"],"yoast_head":"<!-- This site is optimized with the Yoast SEO Premium plugin v26.8 (Yoast SEO v26.8) - 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