PMS CLS-700T Corrosive Liquid Particle Sampler

Features

  • Uses vacuum to fill sample vessel, then pressurizes to count particles without bubbles
  • Comprised of materials compatible with most process chemicals
  • Enables efficient sampling of chemicals from sample bottles, chemical containers, or process baths
CLS-700T Spec

Introduction PMS CLS-700T Corrosive Liquid Particle Sampler

The PMS CLS-700T Corrosive Liquid Particle Sampler is a compression sampler combined with a LiQuilaz® particle counter for effective measurement of particles in fluids contained in unpressurized vessels. It is ideally suited for testing effervescent chemicals. The system eliminates bubbles by pressurizing the sample and forcing the bubbles into solution. It can be integrated into a wet bench for continuous particle monitoring, or located on a cart for increased mobility. When integrated into the wet bench, the sampling system can be started or stopped by the tool, including automatic shutoff during a bath change, to prevent the injection of chemical foam or air into the particle counter. It is fully compliant with SEMI C1 for particle measurement of process chemicals.

Features PMS CLS-700T 
  • Uses vacuum to fill sample vessel, then pressurizes to count particles without bubbles
  • Comprised of materials compatible with most process chemicals
  • Enables efficient sampling of chemicals from sample bottles, chemical containers, or process baths

Benefits PMS CLS-700T 

Versatility

• Supports a wide range of applications and fluids
• Programmable particle-size thresholds
• Designed for easy mobility
• Compression sampling allows instrument to
measure most chemicals, including effervescent
ones
• External trigger coordinates sampling with process
events
• Measurements can be made directly out of the bath

User-Friendly

• Facility Net process control software simplifies
online sampling by providing alphanumeric paging,
sensor status, tabular and SPC charts, and time
plots
• SamplerSight batch sampling software facilitates
all aspects of data management, including
sophisticated data storage, retrieval, and report
generation
• Designed for quick cleanup when switching from
one liquid to another

Cost Reduction

• 100% view volume means quicker process
qualification
• Real-time characterization and analysis for
immediate response to anomalies means less waste

Applications 

  • Particle level measurement in effervescent liquids
  • Process monitoring of wafer cleaning baths
  • Chemical process monitoring
  • Sampling of parts cleaning vessels

Product of Particle Measuring System

 

Brand

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